JPH0623564Y2 - タングステンカ−バイト層を形成する処理装置 - Google Patents
タングステンカ−バイト層を形成する処理装置Info
- Publication number
- JPH0623564Y2 JPH0623564Y2 JP2926287U JP2926287U JPH0623564Y2 JP H0623564 Y2 JPH0623564 Y2 JP H0623564Y2 JP 2926287 U JP2926287 U JP 2926287U JP 2926287 U JP2926287 U JP 2926287U JP H0623564 Y2 JPH0623564 Y2 JP H0623564Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- tungsten carbide
- raw material
- carbide layer
- shielding member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 title claims description 34
- 239000002994 raw material Substances 0.000 claims description 21
- 230000002093 peripheral effect Effects 0.000 claims description 20
- 238000006243 chemical reaction Methods 0.000 claims description 15
- 238000005229 chemical vapour deposition Methods 0.000 claims description 13
- 238000007599 discharging Methods 0.000 claims description 4
- 238000005192 partition Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 110
- 229910052721 tungsten Inorganic materials 0.000 description 10
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 9
- 239000010937 tungsten Substances 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000007747 plating Methods 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 239000007795 chemical reaction product Substances 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 230000006698 induction Effects 0.000 description 3
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 description 3
- 239000012808 vapor phase Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910001018 Cast iron Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2926287U JPH0623564Y2 (ja) | 1987-02-28 | 1987-02-28 | タングステンカ−バイト層を形成する処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2926287U JPH0623564Y2 (ja) | 1987-02-28 | 1987-02-28 | タングステンカ−バイト層を形成する処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63135965U JPS63135965U (enrdf_load_stackoverflow) | 1988-09-07 |
| JPH0623564Y2 true JPH0623564Y2 (ja) | 1994-06-22 |
Family
ID=30832996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2926287U Expired - Lifetime JPH0623564Y2 (ja) | 1987-02-28 | 1987-02-28 | タングステンカ−バイト層を形成する処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0623564Y2 (enrdf_load_stackoverflow) |
-
1987
- 1987-02-28 JP JP2926287U patent/JPH0623564Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63135965U (enrdf_load_stackoverflow) | 1988-09-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP1167570B1 (en) | Reactor for depositing thin film | |
| US4699082A (en) | Apparatus for chemical vapor deposition | |
| US4120930A (en) | Method of coating a composite mold | |
| US10443128B2 (en) | Vessel and method for delivery of precursor materials | |
| US2685124A (en) | Method for hi-vac alloying and coated product | |
| CA2051378A1 (en) | Method for producing a heatable and refrigerable element for a system handling small quantities of liquid, and an element manufactured by the method | |
| JPH0371624A (ja) | 化学的蒸着装置 | |
| KR20140102154A (ko) | 플라즈마 챔버용 가스 분배 부재 제조 방법 | |
| KR20190046985A (ko) | Cvd 반응기 및 cvd 반응기를 세정하기 위한 방법 | |
| US5637815A (en) | Nozzle for fluidized bed mixing/dispersing arrangement | |
| US20070175905A1 (en) | Gas storage container linings formed with chemical vapor deposition | |
| JPH0623564Y2 (ja) | タングステンカ−バイト層を形成する処理装置 | |
| US3399980A (en) | Metallic carbides and a process of producing the same | |
| JPH11158634A (ja) | Ｃｖｄ表面被覆法及びｃｖｄ反応器 | |
| AU731555B2 (en) | Vapor deposition apparatus | |
| US20110058988A1 (en) | Reactor for the Production of Polycrystalline Silicon | |
| US3731650A (en) | Gas distributor for casting mold manufacture | |
| CN113564561A (zh) | 基于流化床和化学气相沉积技术的粉体颗粒包覆设备 | |
| US3120450A (en) | Method for depositing carbon coatings on high temperature material members | |
| EP0682718A1 (en) | PROCESS FOR MAKING Si 3? N 4? BY THE CVD PROCESS. | |
| JPH0689454B2 (ja) | タングステンカ−バイト層を有する耐摩耗性物品 | |
| SU726212A1 (ru) | Устройство дл осаждени материалов из газовой фазы | |
| JPS63195102A (ja) | 窒化アルミニウム粉末の連続的製造方法及び装置 | |
| RU2456373C1 (ru) | Устройство для нанесения металлических покрытий на внутренние поверхности подшипников скольжения cvd-методом металлоорганических соединений | |
| US6010749A (en) | Process for the production of volatile metal |