JPS62110257U - - Google Patents

Info

Publication number
JPS62110257U
JPS62110257U JP19950785U JP19950785U JPS62110257U JP S62110257 U JPS62110257 U JP S62110257U JP 19950785 U JP19950785 U JP 19950785U JP 19950785 U JP19950785 U JP 19950785U JP S62110257 U JPS62110257 U JP S62110257U
Authority
JP
Japan
Prior art keywords
partition plate
vapor deposition
arsenic
vapor
parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19950785U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0315543Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19950785U priority Critical patent/JPH0315543Y2/ja
Publication of JPS62110257U publication Critical patent/JPS62110257U/ja
Application granted granted Critical
Publication of JPH0315543Y2 publication Critical patent/JPH0315543Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Manufacture And Refinement Of Metals (AREA)
JP19950785U 1985-12-27 1985-12-27 Expired JPH0315543Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19950785U JPH0315543Y2 (enrdf_load_stackoverflow) 1985-12-27 1985-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19950785U JPH0315543Y2 (enrdf_load_stackoverflow) 1985-12-27 1985-12-27

Publications (2)

Publication Number Publication Date
JPS62110257U true JPS62110257U (enrdf_load_stackoverflow) 1987-07-14
JPH0315543Y2 JPH0315543Y2 (enrdf_load_stackoverflow) 1991-04-04

Family

ID=31161197

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19950785U Expired JPH0315543Y2 (enrdf_load_stackoverflow) 1985-12-27 1985-12-27

Country Status (1)

Country Link
JP (1) JPH0315543Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0315543Y2 (enrdf_load_stackoverflow) 1991-04-04

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