JPS62110257U - - Google Patents
Info
- Publication number
- JPS62110257U JPS62110257U JP19950785U JP19950785U JPS62110257U JP S62110257 U JPS62110257 U JP S62110257U JP 19950785 U JP19950785 U JP 19950785U JP 19950785 U JP19950785 U JP 19950785U JP S62110257 U JPS62110257 U JP S62110257U
- Authority
- JP
- Japan
- Prior art keywords
- partition plate
- vapor deposition
- arsenic
- vapor
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims description 4
- 229910052785 arsenic Inorganic materials 0.000 claims description 3
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 238000001556 precipitation Methods 0.000 claims 2
- LULLIKNODDLMDQ-UHFFFAOYSA-N arsenic(3+) Chemical compound [As+3] LULLIKNODDLMDQ-UHFFFAOYSA-N 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 1
Description
第１図は本考案の金属砒素蒸着装置の一実施例
の概要を示す断面図であり、第２図は蒸着用内管
の一例の斜視図でａは上下の内管を組合せたもの
、ｂは上下の内管を分離した状態を示す。
１…反応管、２…原料供給部、５…高温加熱部
、６…低温加熱部、８…仕切り板、９…蒸着用内
管、１０，１１…半円筒。
Fig. 1 is a sectional view showing an outline of an embodiment of the metal arsenic vapor deposition apparatus of the present invention, and Fig. 2 is a perspective view of an example of an inner tube for vapor deposition, where a shows a combination of upper and lower inner tubes, and b shows the state in which the upper and lower inner tubes are separated. DESCRIPTION OF SYMBOLS 1... Reaction tube, 2... Raw material supply part, 5... High temperature heating part, 6... Low temperature heating part, 8... Partition plate, 9... Inner tube for vapor deposition, 10, 11... Semi-cylinder.
Claims (1)
装置において、反応管の析出部入口の内壁にリン
グ状に突出した仕切り板を設け、該仕切り板に当
接して反応管の析出部内に容易に出し入れ可能な
外径を持つ軸方向に２つ割りで、且つ長手方向に
複数個に分割された蒸着用内管を装入してなる金
属砒素蒸着装置。 In an apparatus for vapor depositing metallic arsenic from a gas containing arsenic vapor, a ring-shaped partition plate is provided on the inner wall of the entrance of the precipitation section of a reaction tube, and the partition plate is in contact with the partition plate so that it can be easily taken in and out of the precipitation section of the reaction tube. A metal arsenic vapor deposition apparatus comprising an inner tube for vapor deposition which is divided into two parts in the axial direction and into a plurality of parts in the longitudinal direction, each having an outer diameter of about 100 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19950785U JPH0315543Y2 (en) | 1985-12-27 | 1985-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19950785U JPH0315543Y2 (en) | 1985-12-27 | 1985-12-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62110257U true JPS62110257U (en) | 1987-07-14 |
| JPH0315543Y2 JPH0315543Y2 (en) | 1991-04-04 |
Family
ID=31161197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19950785U Expired JPH0315543Y2 (en) | 1985-12-27 | 1985-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0315543Y2 (en) |
-
1985
- 1985-12-27 JP JP19950785U patent/JPH0315543Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0315543Y2 (en) | 1991-04-04 |