JPH0390433U - - Google Patents

Info

Publication number
JPH0390433U
JPH0390433U JP15202089U JP15202089U JPH0390433U JP H0390433 U JPH0390433 U JP H0390433U JP 15202089 U JP15202089 U JP 15202089U JP 15202089 U JP15202089 U JP 15202089U JP H0390433 U JPH0390433 U JP H0390433U
Authority
JP
Japan
Prior art keywords
heating section
tank
substrate
semiconductor manufacturing
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15202089U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15202089U priority Critical patent/JPH0390433U/ja
Publication of JPH0390433U publication Critical patent/JPH0390433U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP15202089U 1989-12-28 1989-12-28 Pending JPH0390433U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15202089U JPH0390433U (enrdf_load_stackoverflow) 1989-12-28 1989-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15202089U JPH0390433U (enrdf_load_stackoverflow) 1989-12-28 1989-12-28

Publications (1)

Publication Number Publication Date
JPH0390433U true JPH0390433U (enrdf_load_stackoverflow) 1991-09-13

Family

ID=31698300

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15202089U Pending JPH0390433U (enrdf_load_stackoverflow) 1989-12-28 1989-12-28

Country Status (1)

Country Link
JP (1) JPH0390433U (enrdf_load_stackoverflow)

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