JPH02122428U - - Google Patents

Info

Publication number
JPH02122428U
JPH02122428U JP3182689U JP3182689U JPH02122428U JP H02122428 U JPH02122428 U JP H02122428U JP 3182689 U JP3182689 U JP 3182689U JP 3182689 U JP3182689 U JP 3182689U JP H02122428 U JPH02122428 U JP H02122428U
Authority
JP
Japan
Prior art keywords
wafers
wafer loader
coating machine
automatic coating
preheats
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3182689U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3182689U priority Critical patent/JPH02122428U/ja
Publication of JPH02122428U publication Critical patent/JPH02122428U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP3182689U 1989-03-20 1989-03-20 Pending JPH02122428U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3182689U JPH02122428U (enrdf_load_stackoverflow) 1989-03-20 1989-03-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3182689U JPH02122428U (enrdf_load_stackoverflow) 1989-03-20 1989-03-20

Publications (1)

Publication Number Publication Date
JPH02122428U true JPH02122428U (enrdf_load_stackoverflow) 1990-10-08

Family

ID=31257979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3182689U Pending JPH02122428U (enrdf_load_stackoverflow) 1989-03-20 1989-03-20

Country Status (1)

Country Link
JP (1) JPH02122428U (enrdf_load_stackoverflow)

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