JPH0610679Y2 - 連続インライン式成膜装置 - Google Patents

連続インライン式成膜装置

Info

Publication number
JPH0610679Y2
JPH0610679Y2 JP16939788U JP16939788U JPH0610679Y2 JP H0610679 Y2 JPH0610679 Y2 JP H0610679Y2 JP 16939788 U JP16939788 U JP 16939788U JP 16939788 U JP16939788 U JP 16939788U JP H0610679 Y2 JPH0610679 Y2 JP H0610679Y2
Authority
JP
Japan
Prior art keywords
substrate
chamber
cart
heating
heating chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP16939788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0291340U (enrdf_load_stackoverflow
Inventor
博 高宮
正義 今村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP16939788U priority Critical patent/JPH0610679Y2/ja
Publication of JPH0291340U publication Critical patent/JPH0291340U/ja
Application granted granted Critical
Publication of JPH0610679Y2 publication Critical patent/JPH0610679Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP16939788U 1988-12-29 1988-12-29 連続インライン式成膜装置 Expired - Lifetime JPH0610679Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16939788U JPH0610679Y2 (ja) 1988-12-29 1988-12-29 連続インライン式成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16939788U JPH0610679Y2 (ja) 1988-12-29 1988-12-29 連続インライン式成膜装置

Publications (2)

Publication Number Publication Date
JPH0291340U JPH0291340U (enrdf_load_stackoverflow) 1990-07-19
JPH0610679Y2 true JPH0610679Y2 (ja) 1994-03-16

Family

ID=31459417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16939788U Expired - Lifetime JPH0610679Y2 (ja) 1988-12-29 1988-12-29 連続インライン式成膜装置

Country Status (1)

Country Link
JP (1) JPH0610679Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6719848B2 (en) * 2001-08-16 2004-04-13 First Solar, Llc Chemical vapor deposition system
JP6196078B2 (ja) * 2012-10-18 2017-09-13 株式会社アルバック 成膜装置

Also Published As

Publication number Publication date
JPH0291340U (enrdf_load_stackoverflow) 1990-07-19

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