JPH0341926U - - Google Patents
Info
- Publication number
- JPH0341926U JPH0341926U JP10229189U JP10229189U JPH0341926U JP H0341926 U JPH0341926 U JP H0341926U JP 10229189 U JP10229189 U JP 10229189U JP 10229189 U JP10229189 U JP 10229189U JP H0341926 U JPH0341926 U JP H0341926U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- resist
- baking apparatus
- mounting plate
- spacer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 8
- 238000001816 cooling Methods 0.000 claims description 5
- 125000006850 spacer group Chemical group 0.000 claims description 5
- 239000000112 cooling gas Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10229189U JPH0341926U (enrdf_load_stackoverflow) | 1989-08-31 | 1989-08-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10229189U JPH0341926U (enrdf_load_stackoverflow) | 1989-08-31 | 1989-08-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0341926U true JPH0341926U (enrdf_load_stackoverflow) | 1991-04-22 |
Family
ID=31651197
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10229189U Pending JPH0341926U (enrdf_load_stackoverflow) | 1989-08-31 | 1989-08-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0341926U (enrdf_load_stackoverflow) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59132128A (ja) * | 1983-01-19 | 1984-07-30 | Toshiba Corp | レジストパタ−ンの形成方法及び装置 |
JPS60263431A (ja) * | 1984-06-12 | 1985-12-26 | Toshiba Corp | レジストパタ−ンの形成方法 |
JPS6167224A (ja) * | 1984-09-07 | 1986-04-07 | Fujitsu Ltd | 半導体装置の製造方法 |
JPS61147527A (ja) * | 1984-12-21 | 1986-07-05 | Toshiba Corp | レジストパタ−ンの形成方法 |
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1989
- 1989-08-31 JP JP10229189U patent/JPH0341926U/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59132128A (ja) * | 1983-01-19 | 1984-07-30 | Toshiba Corp | レジストパタ−ンの形成方法及び装置 |
JPS60263431A (ja) * | 1984-06-12 | 1985-12-26 | Toshiba Corp | レジストパタ−ンの形成方法 |
JPS6167224A (ja) * | 1984-09-07 | 1986-04-07 | Fujitsu Ltd | 半導体装置の製造方法 |
JPS61147527A (ja) * | 1984-12-21 | 1986-07-05 | Toshiba Corp | レジストパタ−ンの形成方法 |