JPH0341926U - - Google Patents

Info

Publication number
JPH0341926U
JPH0341926U JP10229189U JP10229189U JPH0341926U JP H0341926 U JPH0341926 U JP H0341926U JP 10229189 U JP10229189 U JP 10229189U JP 10229189 U JP10229189 U JP 10229189U JP H0341926 U JPH0341926 U JP H0341926U
Authority
JP
Japan
Prior art keywords
substrate
resist
baking apparatus
mounting plate
spacer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10229189U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10229189U priority Critical patent/JPH0341926U/ja
Publication of JPH0341926U publication Critical patent/JPH0341926U/ja
Pending legal-status Critical Current

Links

JP10229189U 1989-08-31 1989-08-31 Pending JPH0341926U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10229189U JPH0341926U (enrdf_load_stackoverflow) 1989-08-31 1989-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10229189U JPH0341926U (enrdf_load_stackoverflow) 1989-08-31 1989-08-31

Publications (1)

Publication Number Publication Date
JPH0341926U true JPH0341926U (enrdf_load_stackoverflow) 1991-04-22

Family

ID=31651197

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10229189U Pending JPH0341926U (enrdf_load_stackoverflow) 1989-08-31 1989-08-31

Country Status (1)

Country Link
JP (1) JPH0341926U (enrdf_load_stackoverflow)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59132128A (ja) * 1983-01-19 1984-07-30 Toshiba Corp レジストパタ−ンの形成方法及び装置
JPS60263431A (ja) * 1984-06-12 1985-12-26 Toshiba Corp レジストパタ−ンの形成方法
JPS6167224A (ja) * 1984-09-07 1986-04-07 Fujitsu Ltd 半導体装置の製造方法
JPS61147527A (ja) * 1984-12-21 1986-07-05 Toshiba Corp レジストパタ−ンの形成方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59132128A (ja) * 1983-01-19 1984-07-30 Toshiba Corp レジストパタ−ンの形成方法及び装置
JPS60263431A (ja) * 1984-06-12 1985-12-26 Toshiba Corp レジストパタ−ンの形成方法
JPS6167224A (ja) * 1984-09-07 1986-04-07 Fujitsu Ltd 半導体装置の製造方法
JPS61147527A (ja) * 1984-12-21 1986-07-05 Toshiba Corp レジストパタ−ンの形成方法

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