JPS6338315U - - Google Patents

Info

Publication number
JPS6338315U
JPS6338315U JP13180086U JP13180086U JPS6338315U JP S6338315 U JPS6338315 U JP S6338315U JP 13180086 U JP13180086 U JP 13180086U JP 13180086 U JP13180086 U JP 13180086U JP S6338315 U JPS6338315 U JP S6338315U
Authority
JP
Japan
Prior art keywords
heater
shield
substrate
plasma
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13180086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13180086U priority Critical patent/JPS6338315U/ja
Publication of JPS6338315U publication Critical patent/JPS6338315U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
JP13180086U 1986-08-27 1986-08-27 Pending JPS6338315U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13180086U JPS6338315U (enrdf_load_stackoverflow) 1986-08-27 1986-08-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13180086U JPS6338315U (enrdf_load_stackoverflow) 1986-08-27 1986-08-27

Publications (1)

Publication Number Publication Date
JPS6338315U true JPS6338315U (enrdf_load_stackoverflow) 1988-03-11

Family

ID=31030587

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13180086U Pending JPS6338315U (enrdf_load_stackoverflow) 1986-08-27 1986-08-27

Country Status (1)

Country Link
JP (1) JPS6338315U (enrdf_load_stackoverflow)

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