JPS62203266U - - Google Patents

Info

Publication number
JPS62203266U
JPS62203266U JP9265586U JP9265586U JPS62203266U JP S62203266 U JPS62203266 U JP S62203266U JP 9265586 U JP9265586 U JP 9265586U JP 9265586 U JP9265586 U JP 9265586U JP S62203266 U JPS62203266 U JP S62203266U
Authority
JP
Japan
Prior art keywords
substrate
tray
thin film
sputtering
thermocouple
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9265586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9265586U priority Critical patent/JPS62203266U/ja
Publication of JPS62203266U publication Critical patent/JPS62203266U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9265586U 1986-06-17 1986-06-17 Pending JPS62203266U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9265586U JPS62203266U (enrdf_load_stackoverflow) 1986-06-17 1986-06-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9265586U JPS62203266U (enrdf_load_stackoverflow) 1986-06-17 1986-06-17

Publications (1)

Publication Number Publication Date
JPS62203266U true JPS62203266U (enrdf_load_stackoverflow) 1987-12-25

Family

ID=30954551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9265586U Pending JPS62203266U (enrdf_load_stackoverflow) 1986-06-17 1986-06-17

Country Status (1)

Country Link
JP (1) JPS62203266U (enrdf_load_stackoverflow)

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