JPS62203267U - - Google Patents

Info

Publication number
JPS62203267U
JPS62203267U JP9265686U JP9265686U JPS62203267U JP S62203267 U JPS62203267 U JP S62203267U JP 9265686 U JP9265686 U JP 9265686U JP 9265686 U JP9265686 U JP 9265686U JP S62203267 U JPS62203267 U JP S62203267U
Authority
JP
Japan
Prior art keywords
tray
substrate
thermocouple
pair
rails
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9265686U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9265686U priority Critical patent/JPS62203267U/ja
Publication of JPS62203267U publication Critical patent/JPS62203267U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP9265686U 1986-06-17 1986-06-17 Pending JPS62203267U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9265686U JPS62203267U (enrdf_load_stackoverflow) 1986-06-17 1986-06-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9265686U JPS62203267U (enrdf_load_stackoverflow) 1986-06-17 1986-06-17

Publications (1)

Publication Number Publication Date
JPS62203267U true JPS62203267U (enrdf_load_stackoverflow) 1987-12-25

Family

ID=30954553

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9265686U Pending JPS62203267U (enrdf_load_stackoverflow) 1986-06-17 1986-06-17

Country Status (1)

Country Link
JP (1) JPS62203267U (enrdf_load_stackoverflow)

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