JPH0279024U - - Google Patents
Info
- Publication number
- JPH0279024U JPH0279024U JP15921288U JP15921288U JPH0279024U JP H0279024 U JPH0279024 U JP H0279024U JP 15921288 U JP15921288 U JP 15921288U JP 15921288 U JP15921288 U JP 15921288U JP H0279024 U JPH0279024 U JP H0279024U
- Authority
- JP
- Japan
- Prior art keywords
- jig
- semiconductor substrate
- heat capacity
- capacity correction
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Heat Treatments In General, Especially Conveying And Cooling (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15921288U JPH0279024U (enrdf_load_stackoverflow) | 1988-12-06 | 1988-12-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15921288U JPH0279024U (enrdf_load_stackoverflow) | 1988-12-06 | 1988-12-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0279024U true JPH0279024U (enrdf_load_stackoverflow) | 1990-06-18 |
Family
ID=31440222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15921288U Pending JPH0279024U (enrdf_load_stackoverflow) | 1988-12-06 | 1988-12-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0279024U (enrdf_load_stackoverflow) |
-
1988
- 1988-12-06 JP JP15921288U patent/JPH0279024U/ja active Pending
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