JPH01167046U - - Google Patents

Info

Publication number
JPH01167046U
JPH01167046U JP6367288U JP6367288U JPH01167046U JP H01167046 U JPH01167046 U JP H01167046U JP 6367288 U JP6367288 U JP 6367288U JP 6367288 U JP6367288 U JP 6367288U JP H01167046 U JPH01167046 U JP H01167046U
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JP
Japan
Prior art keywords
wafer
carrier
guide
transfer position
comb
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6367288U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0727626Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6367288U priority Critical patent/JPH0727626Y2/ja
Publication of JPH01167046U publication Critical patent/JPH01167046U/ja
Application granted granted Critical
Publication of JPH0727626Y2 publication Critical patent/JPH0727626Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP6367288U 1988-05-13 1988-05-13 ウエハー移し換え装置 Expired - Lifetime JPH0727626Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6367288U JPH0727626Y2 (ja) 1988-05-13 1988-05-13 ウエハー移し換え装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6367288U JPH0727626Y2 (ja) 1988-05-13 1988-05-13 ウエハー移し換え装置

Publications (2)

Publication Number Publication Date
JPH01167046U true JPH01167046U (enrdf_load_stackoverflow) 1989-11-22
JPH0727626Y2 JPH0727626Y2 (ja) 1995-06-21

Family

ID=31289165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6367288U Expired - Lifetime JPH0727626Y2 (ja) 1988-05-13 1988-05-13 ウエハー移し換え装置

Country Status (1)

Country Link
JP (1) JPH0727626Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010219337A (ja) * 2009-03-17 2010-09-30 Honda Motor Co Ltd 板状部材の位置決め搬送方法及びその装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010219337A (ja) * 2009-03-17 2010-09-30 Honda Motor Co Ltd 板状部材の位置決め搬送方法及びその装置

Also Published As

Publication number Publication date
JPH0727626Y2 (ja) 1995-06-21

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