JPS6355541U - - Google Patents
Info
- Publication number
- JPS6355541U JPS6355541U JP15004086U JP15004086U JPS6355541U JP S6355541 U JPS6355541 U JP S6355541U JP 15004086 U JP15004086 U JP 15004086U JP 15004086 U JP15004086 U JP 15004086U JP S6355541 U JPS6355541 U JP S6355541U
- Authority
- JP
- Japan
- Prior art keywords
- pusher
- tray
- wafer transfer
- wafers
- cassettes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 7
- 238000005192 partition Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15004086U JPS6355541U (enrdf_load_stackoverflow) | 1986-09-30 | 1986-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15004086U JPS6355541U (enrdf_load_stackoverflow) | 1986-09-30 | 1986-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6355541U true JPS6355541U (enrdf_load_stackoverflow) | 1988-04-14 |
Family
ID=31065810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15004086U Pending JPS6355541U (enrdf_load_stackoverflow) | 1986-09-30 | 1986-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6355541U (enrdf_load_stackoverflow) |
-
1986
- 1986-09-30 JP JP15004086U patent/JPS6355541U/ja active Pending
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