JPS6426368U - - Google Patents

Info

Publication number
JPS6426368U
JPS6426368U JP11984487U JP11984487U JPS6426368U JP S6426368 U JPS6426368 U JP S6426368U JP 11984487 U JP11984487 U JP 11984487U JP 11984487 U JP11984487 U JP 11984487U JP S6426368 U JPS6426368 U JP S6426368U
Authority
JP
Japan
Prior art keywords
heated
heating surface
substrate
heating
linear
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11984487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11984487U priority Critical patent/JPS6426368U/ja
Publication of JPS6426368U publication Critical patent/JPS6426368U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP11984487U 1987-08-06 1987-08-06 Pending JPS6426368U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11984487U JPS6426368U (enrdf_load_stackoverflow) 1987-08-06 1987-08-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11984487U JPS6426368U (enrdf_load_stackoverflow) 1987-08-06 1987-08-06

Publications (1)

Publication Number Publication Date
JPS6426368U true JPS6426368U (enrdf_load_stackoverflow) 1989-02-14

Family

ID=31365429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11984487U Pending JPS6426368U (enrdf_load_stackoverflow) 1987-08-06 1987-08-06

Country Status (1)

Country Link
JP (1) JPS6426368U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6255559B2 (enrdf_load_stackoverflow) * 1980-06-23 1987-11-20 Japan Synthetic Rubber Co Ltd

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6255559B2 (enrdf_load_stackoverflow) * 1980-06-23 1987-11-20 Japan Synthetic Rubber Co Ltd

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