JPH028462B2 - - Google Patents

Info

Publication number
JPH028462B2
JPH028462B2 JP55172930A JP17293080A JPH028462B2 JP H028462 B2 JPH028462 B2 JP H028462B2 JP 55172930 A JP55172930 A JP 55172930A JP 17293080 A JP17293080 A JP 17293080A JP H028462 B2 JPH028462 B2 JP H028462B2
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
wiring
insulating film
forming
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP55172930A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5796548A (en
Inventor
Toshimoto Kodaira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP17293080A priority Critical patent/JPS5796548A/ja
Publication of JPS5796548A publication Critical patent/JPS5796548A/ja
Publication of JPH028462B2 publication Critical patent/JPH028462B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP17293080A 1980-12-08 1980-12-08 Semiconductor device Granted JPS5796548A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17293080A JPS5796548A (en) 1980-12-08 1980-12-08 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17293080A JPS5796548A (en) 1980-12-08 1980-12-08 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS5796548A JPS5796548A (en) 1982-06-15
JPH028462B2 true JPH028462B2 (enrdf_load_stackoverflow) 1990-02-23

Family

ID=15950982

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17293080A Granted JPS5796548A (en) 1980-12-08 1980-12-08 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5796548A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09153594A (ja) * 1995-09-29 1997-06-10 Nec Corp 半導体装置とその製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS504674U (enrdf_load_stackoverflow) * 1973-05-15 1975-01-18
JPS5312385Y2 (enrdf_load_stackoverflow) * 1974-09-02 1978-04-04
JPS51134085A (en) * 1975-05-15 1976-11-20 Fujitsu Ltd Method to manufacture the semiconductor unit

Also Published As

Publication number Publication date
JPS5796548A (en) 1982-06-15

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