JPS5796548A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5796548A JPS5796548A JP17293080A JP17293080A JPS5796548A JP S5796548 A JPS5796548 A JP S5796548A JP 17293080 A JP17293080 A JP 17293080A JP 17293080 A JP17293080 A JP 17293080A JP S5796548 A JPS5796548 A JP S5796548A
- Authority
- JP
- Japan
- Prior art keywords
- poly
- layer
- insulating film
- contact hole
- wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE:To improve the integrity by a method wherein the first poly-Si layer and the second poly-Si layer which are seperated by a layer insulating film are directly contacted with each other through a contact hole. CONSTITUTION:The first poly Si wiring layer 12 is formed on a semiconductor substrate 10 with an insulating film 11 inbetween. Then a contact hole 16 is provided to a layer insulating film 13 formed on the first poly si layer 12 and on the film 13 the second poly Si wiring layer 14 is formed and makes contact with the first poly Si12 through the contact hole 16 and a protective insulating film 15 is formed on the second poly Si14. With the above configuration, an excessive space in multi-layer wiring composition is eliminated, so that the integrity is improved.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17293080A JPS5796548A (en) | 1980-12-08 | 1980-12-08 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17293080A JPS5796548A (en) | 1980-12-08 | 1980-12-08 | Semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5796548A true JPS5796548A (en) | 1982-06-15 |
JPH028462B2 JPH028462B2 (en) | 1990-02-23 |
Family
ID=15950982
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17293080A Granted JPS5796548A (en) | 1980-12-08 | 1980-12-08 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5796548A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09153594A (en) * | 1995-09-29 | 1997-06-10 | Nec Corp | Semiconductor device and its manufacture |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS504674U (en) * | 1973-05-15 | 1975-01-18 | ||
JPS5132378U (en) * | 1974-09-02 | 1976-03-09 | ||
JPS51134085A (en) * | 1975-05-15 | 1976-11-20 | Fujitsu Ltd | Method to manufacture the semiconductor unit |
-
1980
- 1980-12-08 JP JP17293080A patent/JPS5796548A/en active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS504674U (en) * | 1973-05-15 | 1975-01-18 | ||
JPS5132378U (en) * | 1974-09-02 | 1976-03-09 | ||
JPS51134085A (en) * | 1975-05-15 | 1976-11-20 | Fujitsu Ltd | Method to manufacture the semiconductor unit |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09153594A (en) * | 1995-09-29 | 1997-06-10 | Nec Corp | Semiconductor device and its manufacture |
Also Published As
Publication number | Publication date |
---|---|
JPH028462B2 (en) | 1990-02-23 |
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