JPS52156584A - Multilayer wiring type semiconductor device - Google Patents
Multilayer wiring type semiconductor deviceInfo
- Publication number
- JPS52156584A JPS52156584A JP7344276A JP7344276A JPS52156584A JP S52156584 A JPS52156584 A JP S52156584A JP 7344276 A JP7344276 A JP 7344276A JP 7344276 A JP7344276 A JP 7344276A JP S52156584 A JPS52156584 A JP S52156584A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- type semiconductor
- multilayer wiring
- wiring type
- wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To lower resistance and achieve the chemical stability between wiring layers by laminating N type poly-Si and PtSi on a shallow N type diffused layer and further interposing PtSi between a second Al wiring layer and a third laminated layer wiring.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7344276A JPS52156584A (en) | 1976-06-22 | 1976-06-22 | Multilayer wiring type semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7344276A JPS52156584A (en) | 1976-06-22 | 1976-06-22 | Multilayer wiring type semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52156584A true JPS52156584A (en) | 1977-12-27 |
Family
ID=13518345
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7344276A Pending JPS52156584A (en) | 1976-06-22 | 1976-06-22 | Multilayer wiring type semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52156584A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55103740A (en) * | 1979-01-31 | 1980-08-08 | Nec Corp | Semiconductor device |
JPS5972723A (en) * | 1982-10-19 | 1984-04-24 | Matsushita Electric Ind Co Ltd | Formation of ohmic electrode of iii-v group compound semiconductor |
JPS6284537A (en) * | 1985-10-08 | 1987-04-18 | Nec Corp | Semiconductor device |
JPH07221096A (en) * | 1994-01-24 | 1995-08-18 | Lg Semicon Co Ltd | Silicide plug formation |
-
1976
- 1976-06-22 JP JP7344276A patent/JPS52156584A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55103740A (en) * | 1979-01-31 | 1980-08-08 | Nec Corp | Semiconductor device |
JPS5972723A (en) * | 1982-10-19 | 1984-04-24 | Matsushita Electric Ind Co Ltd | Formation of ohmic electrode of iii-v group compound semiconductor |
JPS6284537A (en) * | 1985-10-08 | 1987-04-18 | Nec Corp | Semiconductor device |
JPH07221096A (en) * | 1994-01-24 | 1995-08-18 | Lg Semicon Co Ltd | Silicide plug formation |
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