JPS52156584A - Multilayer wiring type semiconductor device - Google Patents

Multilayer wiring type semiconductor device

Info

Publication number
JPS52156584A
JPS52156584A JP7344276A JP7344276A JPS52156584A JP S52156584 A JPS52156584 A JP S52156584A JP 7344276 A JP7344276 A JP 7344276A JP 7344276 A JP7344276 A JP 7344276A JP S52156584 A JPS52156584 A JP S52156584A
Authority
JP
Japan
Prior art keywords
semiconductor device
type semiconductor
multilayer wiring
wiring type
wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7344276A
Other languages
Japanese (ja)
Inventor
Masaru Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP7344276A priority Critical patent/JPS52156584A/en
Publication of JPS52156584A publication Critical patent/JPS52156584A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To lower resistance and achieve the chemical stability between wiring layers by laminating N type poly-Si and PtSi on a shallow N type diffused layer and further interposing PtSi between a second Al wiring layer and a third laminated layer wiring.
COPYRIGHT: (C)1977,JPO&Japio
JP7344276A 1976-06-22 1976-06-22 Multilayer wiring type semiconductor device Pending JPS52156584A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7344276A JPS52156584A (en) 1976-06-22 1976-06-22 Multilayer wiring type semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7344276A JPS52156584A (en) 1976-06-22 1976-06-22 Multilayer wiring type semiconductor device

Publications (1)

Publication Number Publication Date
JPS52156584A true JPS52156584A (en) 1977-12-27

Family

ID=13518345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7344276A Pending JPS52156584A (en) 1976-06-22 1976-06-22 Multilayer wiring type semiconductor device

Country Status (1)

Country Link
JP (1) JPS52156584A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55103740A (en) * 1979-01-31 1980-08-08 Nec Corp Semiconductor device
JPS5972723A (en) * 1982-10-19 1984-04-24 Matsushita Electric Ind Co Ltd Formation of ohmic electrode of iii-v group compound semiconductor
JPS6284537A (en) * 1985-10-08 1987-04-18 Nec Corp Semiconductor device
JPH07221096A (en) * 1994-01-24 1995-08-18 Lg Semicon Co Ltd Silicide plug formation

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55103740A (en) * 1979-01-31 1980-08-08 Nec Corp Semiconductor device
JPS5972723A (en) * 1982-10-19 1984-04-24 Matsushita Electric Ind Co Ltd Formation of ohmic electrode of iii-v group compound semiconductor
JPS6284537A (en) * 1985-10-08 1987-04-18 Nec Corp Semiconductor device
JPH07221096A (en) * 1994-01-24 1995-08-18 Lg Semicon Co Ltd Silicide plug formation

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