JPS5362488A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5362488A
JPS5362488A JP13822876A JP13822876A JPS5362488A JP S5362488 A JPS5362488 A JP S5362488A JP 13822876 A JP13822876 A JP 13822876A JP 13822876 A JP13822876 A JP 13822876A JP S5362488 A JPS5362488 A JP S5362488A
Authority
JP
Japan
Prior art keywords
semiconductor device
depth
making
sheet resistance
device incorporated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13822876A
Other languages
Japanese (ja)
Other versions
JPS583378B2 (en
Inventor
Yoshihiro Osada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13822876A priority Critical patent/JPS583378B2/en
Publication of JPS5362488A publication Critical patent/JPS5362488A/en
Publication of JPS583378B2 publication Critical patent/JPS583378B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To obtain a semiconductor device incorporated with wiring layers of reduced sheet resistance by making the depth of impurity diffused layers smaller.
COPYRIGHT: (C)1978,JPO&Japio
JP13822876A 1976-11-16 1976-11-16 semiconductor equipment Expired JPS583378B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13822876A JPS583378B2 (en) 1976-11-16 1976-11-16 semiconductor equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13822876A JPS583378B2 (en) 1976-11-16 1976-11-16 semiconductor equipment

Publications (2)

Publication Number Publication Date
JPS5362488A true JPS5362488A (en) 1978-06-03
JPS583378B2 JPS583378B2 (en) 1983-01-21

Family

ID=15217073

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13822876A Expired JPS583378B2 (en) 1976-11-16 1976-11-16 semiconductor equipment

Country Status (1)

Country Link
JP (1) JPS583378B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61182165U (en) * 1985-05-01 1986-11-13

Also Published As

Publication number Publication date
JPS583378B2 (en) 1983-01-21

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