JPS5362488A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5362488A JPS5362488A JP13822876A JP13822876A JPS5362488A JP S5362488 A JPS5362488 A JP S5362488A JP 13822876 A JP13822876 A JP 13822876A JP 13822876 A JP13822876 A JP 13822876A JP S5362488 A JPS5362488 A JP S5362488A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- depth
- making
- sheet resistance
- device incorporated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To obtain a semiconductor device incorporated with wiring layers of reduced sheet resistance by making the depth of impurity diffused layers smaller.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13822876A JPS583378B2 (en) | 1976-11-16 | 1976-11-16 | semiconductor equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13822876A JPS583378B2 (en) | 1976-11-16 | 1976-11-16 | semiconductor equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5362488A true JPS5362488A (en) | 1978-06-03 |
JPS583378B2 JPS583378B2 (en) | 1983-01-21 |
Family
ID=15217073
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13822876A Expired JPS583378B2 (en) | 1976-11-16 | 1976-11-16 | semiconductor equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS583378B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61182165U (en) * | 1985-05-01 | 1986-11-13 |
-
1976
- 1976-11-16 JP JP13822876A patent/JPS583378B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS583378B2 (en) | 1983-01-21 |
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