JPH0260224B2 - - Google Patents

Info

Publication number
JPH0260224B2
JPH0260224B2 JP61254180A JP25418086A JPH0260224B2 JP H0260224 B2 JPH0260224 B2 JP H0260224B2 JP 61254180 A JP61254180 A JP 61254180A JP 25418086 A JP25418086 A JP 25418086A JP H0260224 B2 JPH0260224 B2 JP H0260224B2
Authority
JP
Japan
Prior art keywords
layer
type
inp
field effect
effect transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61254180A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63107172A (ja
Inventor
Goro Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP61254180A priority Critical patent/JPS63107172A/ja
Priority to EP87115444A priority patent/EP0264932A1/en
Priority to KR1019870011772A priority patent/KR900008154B1/ko
Priority to CA000550121A priority patent/CA1261977A/en
Publication of JPS63107172A publication Critical patent/JPS63107172A/ja
Publication of JPH0260224B2 publication Critical patent/JPH0260224B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/40—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels
    • H10D30/47—FETs having zero-dimensional [0D], one-dimensional [1D] or two-dimensional [2D] charge carrier gas channels having 2D charge carrier gas channels, e.g. nanoribbon FETs or high electron mobility transistors [HEMT]
    • H10D30/471—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT]
    • H10D30/473—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having confinement of carriers by multiple heterojunctions, e.g. quantum well HEMT
    • H10D30/4732—High electron mobility transistors [HEMT] or high hole mobility transistors [HHMT] having confinement of carriers by multiple heterojunctions, e.g. quantum well HEMT using Group III-V semiconductor material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/60—Electrodes characterised by their materials
    • H10D64/602—Heterojunction gate electrodes for FETs

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Recrystallisation Techniques (AREA)
JP61254180A 1986-10-24 1986-10-24 電界効果トランジスタ Granted JPS63107172A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP61254180A JPS63107172A (ja) 1986-10-24 1986-10-24 電界効果トランジスタ
EP87115444A EP0264932A1 (en) 1986-10-24 1987-10-21 Field effect transistor
KR1019870011772A KR900008154B1 (ko) 1986-10-24 1987-10-23 전계효과 트랜지스터
CA000550121A CA1261977A (en) 1986-10-24 1987-10-23 Field effect transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61254180A JPS63107172A (ja) 1986-10-24 1986-10-24 電界効果トランジスタ

Publications (2)

Publication Number Publication Date
JPS63107172A JPS63107172A (ja) 1988-05-12
JPH0260224B2 true JPH0260224B2 (enrdf_load_stackoverflow) 1990-12-14

Family

ID=17261341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61254180A Granted JPS63107172A (ja) 1986-10-24 1986-10-24 電界効果トランジスタ

Country Status (1)

Country Link
JP (1) JPS63107172A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0803912A4 (en) * 1995-11-09 1999-11-24 Matsushita Electronics Corp FIELD EFFECT TRANSISTOR

Also Published As

Publication number Publication date
JPS63107172A (ja) 1988-05-12

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term