JPH0242798B2 - - Google Patents

Info

Publication number
JPH0242798B2
JPH0242798B2 JP59191916A JP19191684A JPH0242798B2 JP H0242798 B2 JPH0242798 B2 JP H0242798B2 JP 59191916 A JP59191916 A JP 59191916A JP 19191684 A JP19191684 A JP 19191684A JP H0242798 B2 JPH0242798 B2 JP H0242798B2
Authority
JP
Japan
Prior art keywords
copper
metal
bonding
substrate
eutectic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59191916A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60155580A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS60155580A publication Critical patent/JPS60155580A/ja
Publication of JPH0242798B2 publication Critical patent/JPH0242798B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/24Selection of soldering or welding materials proper
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/19Soldering, e.g. brazing, or unsoldering taking account of the properties of the materials to be soldered
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/001Interlayers, transition pieces for metallurgical bonding of workpieces
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B37/00Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/02Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
    • C04B37/023Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
    • C04B37/026Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used consisting of metals or metal salts
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/34Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/34Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
    • H01L24/39Structure, shape, material or disposition of the strap connectors after the connecting process
    • H01L24/40Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/04Ceramic interlayers
    • C04B2237/06Oxidic interlayers
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/32Ceramic
    • C04B2237/34Oxidic
    • C04B2237/343Alumina or aluminates
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/30Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
    • C04B2237/40Metallic
    • C04B2237/407Copper
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/54Oxidising the surface before joining
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/56Using constraining layers before or during sintering
    • C04B2237/567Using constraining layers before or during sintering made of metal
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/70Forming laminates or joined articles comprising layers of a specific, unusual thickness
    • C04B2237/708Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the interlayers
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2237/00Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/50Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
    • C04B2237/76Forming laminates or joined articles comprising at least one member in the form other than a sheet or disc, e.g. two tubes or a tube and a sheet or disc
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/34Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
    • H01L2224/39Structure, shape, material or disposition of the strap connectors after the connecting process
    • H01L2224/40Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
    • H01L2224/4005Shape
    • H01L2224/4009Loop shape
    • H01L2224/40091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/84Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a strap connector
    • H01L2224/848Bonding techniques
    • H01L2224/84801Soldering or alloying
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/84Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a strap connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01029Copper [Cu]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01078Platinum [Pt]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013Alloys
    • H01L2924/0132Binary Alloys
    • H01L2924/01322Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/12Passive devices, e.g. 2 terminal devices
    • H01L2924/1204Optical Diode
    • H01L2924/12044OLED
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/03Use of materials for the substrate
    • H05K1/0306Inorganic insulating substrates, e.g. ceramic, glass
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03Conductive materials
    • H05K2201/0332Structure of the conductor
    • H05K2201/0335Layered conductors or foils
    • H05K2201/0355Metal foils
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/20Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
    • H05K3/202Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern using self-supporting metal foil pattern
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S228/00Metal fusion bonding
    • Y10S228/903Metal to nonmetal

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Products (AREA)
JP59191916A 1975-07-30 1984-09-14 セラミツク基体または金属基体に銅部材を結合する方法 Granted JPS60155580A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US600300 1975-07-30
US05/600,300 US3994430A (en) 1975-07-30 1975-07-30 Direct bonding of metals to ceramics and metals
US696899 1976-06-17

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP1096541A Division JPH01308885A (ja) 1975-07-30 1989-04-18 セラミック基体に銅部材を結合する方法

Publications (2)

Publication Number Publication Date
JPS60155580A JPS60155580A (ja) 1985-08-15
JPH0242798B2 true JPH0242798B2 (zh) 1990-09-26

Family

ID=24403056

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59191916A Granted JPS60155580A (ja) 1975-07-30 1984-09-14 セラミツク基体または金属基体に銅部材を結合する方法

Country Status (2)

Country Link
US (1) US3994430A (zh)
JP (1) JPS60155580A (zh)

Families Citing this family (156)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4129243A (en) * 1975-07-30 1978-12-12 General Electric Company Double side cooled, pressure mounted semiconductor package and process for the manufacture thereof
CH633391A5 (de) * 1978-11-22 1982-11-30 Bbc Brown Boveri & Cie Scheibenrotor fuer eine elektrische maschine.
US4278990A (en) * 1979-03-19 1981-07-14 General Electric Company Low thermal resistance, low stress semiconductor package
US4323483A (en) * 1979-11-08 1982-04-06 E. I. Du Pont De Nemours And Company Mixed oxide bonded copper conductor compositions
DE3036128C2 (de) * 1980-09-25 1983-08-18 Brown, Boveri & Cie Ag, 6800 Mannheim Verfahren zum direkten Verbinden von Kupferfolien mit Oxidkeramiksubstraten
JPS5772234A (en) * 1980-10-20 1982-05-06 Matsushita Electric Ind Co Ltd Production of electrode structure
US4413766A (en) * 1981-04-03 1983-11-08 General Electric Company Method of forming a conductor pattern including fine conductor runs on a ceramic substrate
US4409278A (en) * 1981-04-16 1983-10-11 General Electric Company Blister-free direct bonding of metals to ceramics and metals
DE3127457C2 (de) * 1981-07-11 1985-09-12 Brown, Boveri & Cie Ag, 6800 Mannheim Stromrichtermodul
DE3204167A1 (de) * 1982-02-06 1983-08-11 Brown, Boveri & Cie Ag, 6800 Mannheim Verfahren zum direkten verbinden von metallstuecken mit oxidkeramiksubstraten
US4500029A (en) * 1982-06-11 1985-02-19 General Electric Company Electrical assembly including a conductor pattern bonded to a non-metallic substrate and method of fabricating such assembly
EP0097944B1 (en) * 1982-06-29 1988-06-01 Kabushiki Kaisha Toshiba Method for directly bonding ceramic and metal members and laminated body of the same
DE3233022A1 (de) * 1982-09-06 1984-03-08 BBC Aktiengesellschaft Brown, Boveri & Cie., 5401 Baden, Aargau Verfahren zum direkten verbinden eines koerpers mit einem keramischen substrat
US4468299A (en) * 1982-12-20 1984-08-28 Aluminum Company Of America Friction welded nonconsumable electrode assembly and use thereof for electrolytic production of metals and silicon
US4468298A (en) * 1982-12-20 1984-08-28 Aluminum Company Of America Diffusion welded nonconsumable electrode assembly and use thereof for electrolytic production of metals and silicon
US4468300A (en) * 1982-12-20 1984-08-28 Aluminum Company Of America Nonconsumable electrode assembly and use thereof for the electrolytic production of metals and silicon
US4457811A (en) * 1982-12-20 1984-07-03 Aluminum Company Of America Process for producing elements from a fused bath using a metal strap and ceramic electrode body nonconsumable electrode assembly
JPS59150453A (ja) * 1982-12-23 1984-08-28 Toshiba Corp 半導体モジユ−ル用基板の製造方法
US4538170A (en) * 1983-01-03 1985-08-27 General Electric Company Power chip package
GB8305366D0 (en) * 1983-02-25 1983-03-30 Secr Defence Cathode ray tube
US4574094A (en) * 1983-06-09 1986-03-04 Kollmorgen Technologies Corporation Metallization of ceramics
US4604299A (en) * 1983-06-09 1986-08-05 Kollmorgen Technologies Corporation Metallization of ceramics
DE3324661A1 (de) * 1983-07-08 1985-01-17 Brown, Boveri & Cie Ag, 6800 Mannheim Verfahren zum direkten verbinden von metall mit keramik
EP0135120B1 (de) * 1983-08-23 1988-03-09 BBC Brown Boveri AG Keramik-Metall-Element
GB2146174B (en) * 1983-09-06 1987-04-23 Gen Electric Hermetic power chip packages
JPS60131875A (ja) * 1983-12-20 1985-07-13 三菱重工業株式会社 セラミツクと金属の接合法
US4563383A (en) * 1984-03-30 1986-01-07 General Electric Company Direct bond copper ceramic substrate for electronic applications
CH660176A5 (de) * 1984-07-06 1987-03-31 Bbc Brown Boveri & Cie Metall-keramik-verbundelement und verfahren zu dessen herstellung.
US4647477A (en) * 1984-12-07 1987-03-03 Kollmorgen Technologies Corporation Surface preparation of ceramic substrates for metallization
EP0185967A3 (en) * 1984-12-10 1988-08-03 Kollmorgen Corporation Process for avoiding blister formation in electroless metallization of ceramic substrates
US4602731A (en) * 1984-12-24 1986-07-29 Borg-Warner Corporation Direct liquid phase bonding of ceramics to metals
JPS61176142A (ja) * 1985-01-31 1986-08-07 Toshiba Corp 基板構造体
JPH0785495B2 (ja) * 1985-03-18 1995-09-13 ティーディーケイ株式会社 酸化物セラミツク上の銅電極形成法
US4635497A (en) * 1985-08-26 1987-01-13 Clark Michigan Company Single lever shift
JPS6272576A (ja) * 1985-09-26 1987-04-03 株式会社東芝 セラミツクス−金属接合体
DE3538933A1 (de) * 1985-11-02 1987-05-14 Bbc Brown Boveri & Cie Leistungshalbleitermodul
US4872606A (en) * 1985-12-11 1989-10-10 Hitachi, Ltd. Sealed structure and production method thereof
DE3617456A1 (de) * 1986-05-23 1987-12-03 Vaw Ver Aluminium Werke Ag Verfahren und vorrichtung zur festen verbindung von keramischen formteilen mit metallen
US5058799A (en) * 1986-07-24 1991-10-22 Zsamboky Kalman F Metallized ceramic substrate and method therefor
DE3639021A1 (de) * 1986-11-14 1988-05-26 Philips Patentverwaltung Verfahren zum verloeten von keramischen bauteilen
EP0273227A3 (en) * 1986-12-22 1989-01-25 Kalman F. Zsamboky A method of improving bond strength between a metal layer and a non-metallic substrate
JPS63166774A (ja) * 1986-12-27 1988-07-09 同和鉱業株式会社 銅板とアルミナ基板との接合体の製造方法
US4816422A (en) * 1986-12-29 1989-03-28 General Electric Company Fabrication of large power semiconductor composite by wafer interconnection of individual devices
JPH0793390B2 (ja) * 1987-01-16 1995-10-09 日本電気株式会社 Icカード等のための薄型構造の紫外線透過型半導体装置パッケージ
GB2201123B (en) * 1987-02-19 1990-11-14 Marconi Electronic Devices Electrical conductor arrangement
FR2623046B1 (fr) * 1987-11-10 1990-03-23 Telemecanique Electrique Procede de liaison d'une feuille de cuivre a un substrat en materiau electriquement isolant
US4788765A (en) * 1987-11-13 1988-12-06 Gentron Corporation Method of making circuit assembly with hardened direct bond lead frame
FR2626270B1 (fr) * 1988-01-22 1992-04-30 Pechiney Recherche Procede de cofrittage, de conducteurs en cuivre ou en alliages a base de cuivre et de leur substrat ceramique en cordierite
JP2755594B2 (ja) * 1988-03-30 1998-05-20 株式会社 東芝 セラミックス回路基板
US4879633A (en) * 1988-04-12 1989-11-07 Kaufman Lance R Direct bond circuit assembly with ground plane
US4831723A (en) * 1988-04-12 1989-05-23 Kaufman Lance R Direct bond circuit assembly with crimped lead frame
US4990720A (en) * 1988-04-12 1991-02-05 Kaufman Lance R Circuit assembly and method with direct bonded terminal pin
US4924292A (en) * 1988-04-12 1990-05-08 Kaufman Lance R Direct bond circuit assembly with crimped lead frame
US4902854A (en) * 1988-04-12 1990-02-20 Kaufman Lance R Hermetic direct bond circuit assembly
US5032691A (en) * 1988-04-12 1991-07-16 Kaufman Lance R Electric circuit assembly with voltage isolation
US5070602A (en) * 1988-04-12 1991-12-10 Lance R. Kaufman Method of making a circuit assembly
US5040292A (en) * 1988-07-07 1991-08-20 Texas Instruments Incorporated Method of forming dielectric layer on a metal substrate having improved adhesion
US4936010A (en) * 1988-07-07 1990-06-26 Texas Instruments Incorporated Method of forming dielectric layer on a metal substrate having improved adhesion
DE3924225C2 (de) * 1988-07-22 1994-01-27 Mitsubishi Electric Corp Verfahren zur Herstellung eines Keramik-Metall-Verbundsubstrats sowie Keramik-Metall-Verbundsubstrat
US5251803A (en) * 1988-07-22 1993-10-12 Mitsubishi Denki Kabushiki Kaisha Ceramic-metal composite substrate and method for producing the same
US4860164A (en) * 1988-09-01 1989-08-22 Kaufman Lance R Heat sink apparatus with electrically insulative intermediate conduit portion for coolant flow
US5100740A (en) * 1989-09-25 1992-03-31 General Electric Company Direct bonded symmetric-metallic-laminate/substrate structures
US5653379A (en) * 1989-12-18 1997-08-05 Texas Instruments Incorporated Clad metal substrate
US5273203A (en) * 1989-12-21 1993-12-28 General Electric Company Ceramic-to-conducting-lead hermetic seal
US5241216A (en) * 1989-12-21 1993-08-31 General Electric Company Ceramic-to-conducting-lead hermetic seal
US4996116A (en) * 1989-12-21 1991-02-26 General Electric Company Enhanced direct bond structure
US5164359A (en) * 1990-04-20 1992-11-17 Eaton Corporation Monolithic integrated circuit having compound semiconductor layer epitaxially grown on ceramic substrate
JP3011433B2 (ja) * 1990-05-25 2000-02-21 株式会社東芝 セラミックス回路基板の製造方法
JP2504610B2 (ja) * 1990-07-26 1996-06-05 株式会社東芝 電力用半導体装置
US5074941A (en) * 1990-12-10 1991-12-24 Cornell Research Foundation, Inc. Enhancing bonding at metal-ceramic interfaces
US5418002A (en) * 1990-12-24 1995-05-23 Harris Corporation Direct bonding of copper to aluminum nitride substrates
JPH0747793B2 (ja) * 1991-04-26 1995-05-24 株式会社クボタ 酸化物分散強化耐熱焼結合金
JPH05166969A (ja) * 1991-10-14 1993-07-02 Fuji Electric Co Ltd 半導体装置
FR2692887B1 (fr) * 1992-06-29 1996-11-29 Alsthom Cge Alcatel Procede pour realiser une liaison entre du cuivre et un substrat pour l'electronique de puissance en ceramique non oxyde.
DE4222973A1 (de) * 1992-07-13 1994-01-20 Asea Brown Boveri Bidirektionaler Halbleiterschalter
US5384691A (en) * 1993-01-08 1995-01-24 General Electric Company High density interconnect multi-chip modules including embedded distributed power supply elements
DE4318061C2 (de) * 1993-06-01 1998-06-10 Schulz Harder Juergen Verfahren zum Herstellen eines Metall-Keramik-Substrates
DE4319944C2 (de) * 1993-06-03 1998-07-23 Schulz Harder Juergen Mehrfach-Substrat sowie Verfahren zu seiner Herstellung
DE4320910C1 (de) * 1993-06-18 1994-09-08 Siemens Ag Verfahren zur Herstellung einer gasdichten Lötverbindung und Anwendung des Verfahrens bei der Herstellung von Bauelementen mit vakuumdichten Gehäuse
DE4328353C2 (de) * 1993-08-17 1996-06-05 Schulz Harder Juergen Mehrschicht-Substrat
US5777259A (en) * 1994-01-14 1998-07-07 Brush Wellman Inc. Heat exchanger assembly and method for making the same
CA2140311A1 (en) * 1994-01-14 1995-07-15 Joseph P. Mennucci Multilayer laminate product and process
JP2918191B2 (ja) * 1994-04-11 1999-07-12 同和鉱業株式会社 金属−セラミックス複合部材の製造方法
US5965193A (en) 1994-04-11 1999-10-12 Dowa Mining Co., Ltd. Process for preparing a ceramic electronic circuit board and process for preparing aluminum or aluminum alloy bonded ceramic material
US5586714A (en) * 1994-10-06 1996-12-24 Board Of Regents Of The University Of Nebraska Method of bonding metal to a non-metal substrate
US5675181A (en) * 1995-01-19 1997-10-07 Fuji Electric Co., Ltd. Zirconia-added alumina substrate with direct bonding of copper
US5637802A (en) * 1995-02-28 1997-06-10 Rosemount Inc. Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
CN1139117C (zh) * 1995-03-20 2004-02-18 株式会社东芝 氮化硅电路板
US6022426A (en) * 1995-05-31 2000-02-08 Brush Wellman Inc. Multilayer laminate process
DE19527611B4 (de) * 1995-07-28 2006-05-24 Schulz-Harder, Jürgen, Dr.-Ing. Verfahren zum Herstellen eines Substrats für elektrische Schaltkreise
JPH09153567A (ja) * 1995-09-28 1997-06-10 Toshiba Corp 高熱伝導性窒化珪素回路基板および半導体装置
US5602865A (en) * 1995-11-14 1997-02-11 Synrad, Inc. RF-excited gas laser system
US5760473A (en) * 1996-06-25 1998-06-02 Brush Wellman Inc. Semiconductor package having a eutectic bonding layer
US6056186A (en) * 1996-06-25 2000-05-02 Brush Wellman Inc. Method for bonding a ceramic to a metal with a copper-containing shim
US5900097A (en) * 1996-10-30 1999-05-04 Brown; Dennis P. Method of fabricating a laminated composite material
JP3592486B2 (ja) 1997-06-18 2004-11-24 株式会社東芝 ハンダ付け装置
US6057871A (en) * 1998-07-10 2000-05-02 Litton Systems, Inc. Laser marking system and associated microlaser apparatus
US6199748B1 (en) * 1999-08-20 2001-03-13 Nova Crystals, Inc. Semiconductor eutectic alloy metal (SEAM) technology for fabrication of compliant composite substrates and integration of materials
AU2629901A (en) 2000-01-06 2001-07-16 Rosemount Inc. Grain growth of electrical interconnection for microelectromechanical systems (mems)
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier
JP4756200B2 (ja) 2000-09-04 2011-08-24 Dowaメタルテック株式会社 金属セラミックス回路基板
JP4434545B2 (ja) 2001-03-01 2010-03-17 Dowaホールディングス株式会社 半導体実装用絶縁基板及びパワーモジュール
US6521350B2 (en) 2001-06-18 2003-02-18 Alfred E. Mann Foundation For Scientific Research Application and manufacturing method for a ceramic to metal seal
JP3969987B2 (ja) * 2001-10-01 2007-09-05 Dowaホールディングス株式会社 セラミックスと合金の接合体
DE10148550B4 (de) * 2001-10-01 2007-03-29 Electrovac Ag Verfahren zum Herstellen von Metall-Keramik-Verbundmaterialien, insbesondere Metall-Keramik-Substraten
US6699571B1 (en) 2002-03-27 2004-03-02 Morgan Advanced Ceramics, Inc. Devices and methods for mounting components of electronic circuitry
US6848316B2 (en) 2002-05-08 2005-02-01 Rosemount Inc. Pressure sensor assembly
JP3868854B2 (ja) * 2002-06-14 2007-01-17 Dowaホールディングス株式会社 金属−セラミックス接合体およびその製造方法
US6905979B2 (en) * 2002-12-23 2005-06-14 Intel Corporation Apparatus and method for improving AC coupling on circuit boards
DE10261402A1 (de) * 2002-12-30 2004-07-15 Schulz-Harder, Jürgen, Dr.-Ing. Wärmesenke in Form einer Heat-Pipe sowie Verfahren zum Herstellen einer solchen Wärmesenke
US6989200B2 (en) * 2003-10-30 2006-01-24 Alfred E. Mann Foundation For Scientific Research Ceramic to noble metal braze and method of manufacture
US6986453B2 (en) * 2003-11-13 2006-01-17 Alfred E. Mann Foundation For Scientific Research Manufacturing method for a ceramic to metal seal
US7022415B2 (en) * 2004-03-03 2006-04-04 Alfred E. Mann Foundation For Scientific Research Layered sphere braze material
US20050194426A1 (en) * 2004-03-03 2005-09-08 Guangqiang Jiang Brazing titanium to stainless steel using nickel filler material
US20050196631A1 (en) * 2004-03-03 2005-09-08 Schnittgrund Gary D. Layered deposition braze material
US20050224558A1 (en) * 2004-04-07 2005-10-13 Guangqiang Jiang Brazing titanium to stainless steel using laminated Ti-Ni filler material
US7157150B2 (en) * 2004-04-07 2007-01-02 Alfred E. Mann Foundation For Scientific Research Brazing titanium to stainless steel using layered particulate
US20050228467A1 (en) * 2004-04-07 2005-10-13 Guangqiang Jiang Implantable miniature titanium to stainless steel connector
US8329314B1 (en) 2004-10-12 2012-12-11 Boston Scientific Neuromodulation Corporation Hermetically bonding ceramic and titanium with a palladium braze
US7771838B1 (en) 2004-10-12 2010-08-10 Boston Scientific Neuromodulation Corporation Hermetically bonding ceramic and titanium with a Ti-Pd braze interface
US7538401B2 (en) 2005-05-03 2009-05-26 Rosemount Aerospace Inc. Transducer for use in harsh environments
US7628309B1 (en) * 2005-05-03 2009-12-08 Rosemount Aerospace Inc. Transient liquid phase eutectic bonding
US20070013014A1 (en) * 2005-05-03 2007-01-18 Shuwen Guo High temperature resistant solid state pressure sensor
US20070231590A1 (en) * 2006-03-31 2007-10-04 Stellar Industries Corp. Method of Bonding Metals to Ceramics
US7498516B1 (en) * 2006-06-14 2009-03-03 Boston Scientific Neuromodulation Corporation Feedthru assembly
WO2010050266A1 (ja) * 2008-10-27 2010-05-06 日立化成工業株式会社 銅の表面処理方法及び銅
DE102010007919B4 (de) 2010-02-12 2022-03-03 Rogers Germany Gmbh Verfahren zum Herstellen von Metall-Keramik-Substraten sowie nach diesem Verfahren hergestelltes Metall-Keramik-Substrat
DE102010023637B4 (de) 2010-06-14 2012-01-12 Ixys Semiconductor Gmbh Verfahren zum Herstellen von doppelseitig metallisierten Metall-Keramik-Substraten
DE102011103746A1 (de) * 2011-05-31 2012-12-06 Ixys Semiconductor Gmbh Verfahren zum Fügen von Metall-Keramik-Substraten an Metallkörpern
DE102012024063B4 (de) 2012-12-07 2016-12-29 Ixys Semiconductor Gmbh Verfahren zur Herstellung von Substraten für Leistungshalbleiterbauelemente
CH708666A1 (de) * 2013-10-08 2015-04-15 Kistler Holding Ag Verfahren zur Herstellung einer Metall-Keramiklötverbindung.
DE102014215377B4 (de) 2014-08-05 2019-11-07 Heraeus Deutschland GmbH & Co. KG Verfahren zum Herstellen von doppelseitig metallisierten Keramik-Substraten
DE102014224588B4 (de) 2014-12-02 2019-08-01 Heraeus Deutschland GmbH & Co. KG Verfahren zum Herstellen eines plattenförmigen metallisierten Keramik-Substrats, Träger zum Herstellen des Substrats und Verwendung des Trägers
DE102015102657B4 (de) 2015-02-25 2018-07-19 Rogers Germany Gmbh Verfahren zur Herstellung eines Kupfer-Keramik-Verbundsubstrats
JP7032042B2 (ja) 2015-12-22 2022-03-08 ヘレウス ドイチェラント ゲーエムベーハー ウント カンパニー カーゲー 厚膜ペーストを用いて改善された直接接合銅(direct-bonded copper)基板
EP3210956B1 (de) 2016-02-26 2018-04-11 Heraeus Deutschland GmbH & Co. KG Kupfer-keramik-verbund
DE102016203030A1 (de) 2016-02-26 2017-08-31 Heraeus Deutschland GmbH & Co. KG Kupfer-Keramik-Verbund
DE202016008307U1 (de) 2016-02-26 2017-07-10 Heraeus Deutschland GmbH & Co. KG Kupfer-Keramik-Verbund
DE202016008371U1 (de) 2016-02-26 2017-09-11 Heraeus Deutschland GmbH & Co. KG Kupfer-Keramik-Verbund
DE102016203112B4 (de) 2016-02-26 2019-08-29 Heraeus Deutschland GmbH & Co. KG Kupfer-Keramik-Verbund
DE202016008370U1 (de) 2016-02-26 2017-09-11 Heraeus Deutschland GmbH & Co. KG Kupfer-Keramik-Verbund
DE202016008286U1 (de) 2016-02-26 2017-06-21 Heraeus Deutschland GmbH & Co. KG Kupfer-Keramik-Verbund
HUE053549T2 (hu) 2016-02-26 2021-07-28 Heraeus Deutschland Gmbh & Co Kg Réz-kerámia kompozit
HUE053117T2 (hu) 2016-02-26 2021-06-28 Heraeus Deutschland Gmbh & Co Kg Réz-kerámia kompozitok
DE202016008287U1 (de) 2016-02-26 2017-06-21 Heraeus Deutschland GmbH & Co. KG Kupfer-Keramik-Verbund
DE102016203058B3 (de) 2016-02-26 2017-05-18 Heraeus Deutschland GmbH & Co. KG Kupfer-Keramik-Verbund und Modul
EP3210957B1 (de) 2016-02-26 2019-01-02 Heraeus Deutschland GmbH & Co. KG Kupfer-keramik-verbund
US10000423B1 (en) * 2016-03-31 2018-06-19 Ixys, Llc Direct metal bonding on carbon-covered ceramic contact projections of a ceramic carrier
DE102018101198A1 (de) 2018-01-19 2019-07-25 Osram Opto Semiconductors Gmbh Verfahren zum herstellen eines gehäusedeckels für ein laserbauelement und gehäusedeckel für ein laserbauelement sowie laserbauelement
JP6782996B1 (ja) 2019-07-08 2020-11-11 株式会社ワールドメタル 接合基材と金属層の接合体
TWI761734B (zh) 2019-11-26 2022-04-21 財團法人工業技術研究院 覆銅陶瓷基板
CN117457504B (zh) * 2023-12-22 2024-03-08 成都万士达瓷业有限公司 一种陶瓷封装表面覆铜的生产方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3911553A (en) * 1974-03-04 1975-10-14 Gen Electric Method for bonding metal to ceramic

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