JPH0238728U - - Google Patents

Info

Publication number
JPH0238728U
JPH0238728U JP1988117423U JP11742388U JPH0238728U JP H0238728 U JPH0238728 U JP H0238728U JP 1988117423 U JP1988117423 U JP 1988117423U JP 11742388 U JP11742388 U JP 11742388U JP H0238728 U JPH0238728 U JP H0238728U
Authority
JP
Japan
Prior art keywords
wafer
susceptor
counterbore
reactor
ring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1988117423U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988117423U priority Critical patent/JPH0238728U/ja
Publication of JPH0238728U publication Critical patent/JPH0238728U/ja
Pending legal-status Critical Current

Links

JP1988117423U 1988-09-08 1988-09-08 Pending JPH0238728U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988117423U JPH0238728U (enExample) 1988-09-08 1988-09-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988117423U JPH0238728U (enExample) 1988-09-08 1988-09-08

Publications (1)

Publication Number Publication Date
JPH0238728U true JPH0238728U (enExample) 1990-03-15

Family

ID=31360871

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988117423U Pending JPH0238728U (enExample) 1988-09-08 1988-09-08

Country Status (1)

Country Link
JP (1) JPH0238728U (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002231645A (ja) * 2001-02-02 2002-08-16 Ngk Insulators Ltd 窒化物半導体膜の製造方法
JP2009252969A (ja) * 2008-04-04 2009-10-29 Sumitomo Electric Ind Ltd サセプタおよび気相成長装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002231645A (ja) * 2001-02-02 2002-08-16 Ngk Insulators Ltd 窒化物半導体膜の製造方法
JP2009252969A (ja) * 2008-04-04 2009-10-29 Sumitomo Electric Ind Ltd サセプタおよび気相成長装置

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