JPH0234746B2 - - Google Patents
Info
- Publication number
- JPH0234746B2 JPH0234746B2 JP57189303A JP18930382A JPH0234746B2 JP H0234746 B2 JPH0234746 B2 JP H0234746B2 JP 57189303 A JP57189303 A JP 57189303A JP 18930382 A JP18930382 A JP 18930382A JP H0234746 B2 JPH0234746 B2 JP H0234746B2
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- gear
- sun gear
- cloth
- polishing cloth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000005498 polishing Methods 0.000 claims description 52
- 239000004744 fabric Substances 0.000 claims description 38
- 238000000034 method Methods 0.000 claims description 19
- 238000004140 cleaning Methods 0.000 claims description 17
- 230000000694 effects Effects 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 239000004677 Nylon Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229920001778 nylon Polymers 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000008119 colloidal silica Substances 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229920002302 Nylon 6,6 Polymers 0.000 description 1
- 229920005830 Polyurethane Foam Polymers 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 239000011496 polyurethane foam Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/002—Grinding heads
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57189303A JPS5981054A (ja) | 1982-10-29 | 1982-10-29 | 研磨布クリーニング方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57189303A JPS5981054A (ja) | 1982-10-29 | 1982-10-29 | 研磨布クリーニング方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5981054A JPS5981054A (ja) | 1984-05-10 |
| JPH0234746B2 true JPH0234746B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-08-06 |
Family
ID=16239072
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57189303A Granted JPS5981054A (ja) | 1982-10-29 | 1982-10-29 | 研磨布クリーニング方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5981054A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09314457A (ja) * | 1996-05-29 | 1997-12-09 | Speedfam Co Ltd | ドレッサ付き片面研磨装置 |
| US6338672B1 (en) * | 1998-12-21 | 2002-01-15 | White Hydraulics, Inc. | Dressing wheel system |
| WO2000069597A1 (fr) | 1999-05-17 | 2000-11-23 | Kashiwara Machine Mfg. Co., Ltd. | Procede et dispositif de polissage double face |
| JP4753319B2 (ja) * | 2008-01-28 | 2011-08-24 | 株式会社住友金属ファインテック | 両面研摩装置並びにこれに使用されるブラシ及びドレッサ |
| US8966698B2 (en) * | 2012-11-27 | 2015-03-03 | Techtronic Floor Care Technology Limited | Brush head for an electric toothbrush |
| CN107520754A (zh) * | 2017-08-11 | 2017-12-29 | 郑州磨料磨具磨削研究所有限公司 | 一种研磨机清洗机构 |
-
1982
- 1982-10-29 JP JP57189303A patent/JPS5981054A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5981054A (ja) | 1984-05-10 |