JPS5981054A - 研磨布クリーニング方法 - Google Patents

研磨布クリーニング方法

Info

Publication number
JPS5981054A
JPS5981054A JP57189303A JP18930382A JPS5981054A JP S5981054 A JPS5981054 A JP S5981054A JP 57189303 A JP57189303 A JP 57189303A JP 18930382 A JP18930382 A JP 18930382A JP S5981054 A JPS5981054 A JP S5981054A
Authority
JP
Japan
Prior art keywords
gear
abraisive
brush
rotate
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57189303A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0234746B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Masaharu Kinoshita
正治 木下
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP57189303A priority Critical patent/JPS5981054A/ja
Publication of JPS5981054A publication Critical patent/JPS5981054A/ja
Publication of JPH0234746B2 publication Critical patent/JPH0234746B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/002—Grinding heads

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
JP57189303A 1982-10-29 1982-10-29 研磨布クリーニング方法 Granted JPS5981054A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57189303A JPS5981054A (ja) 1982-10-29 1982-10-29 研磨布クリーニング方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57189303A JPS5981054A (ja) 1982-10-29 1982-10-29 研磨布クリーニング方法

Publications (2)

Publication Number Publication Date
JPS5981054A true JPS5981054A (ja) 1984-05-10
JPH0234746B2 JPH0234746B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-08-06

Family

ID=16239072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57189303A Granted JPS5981054A (ja) 1982-10-29 1982-10-29 研磨布クリーニング方法

Country Status (1)

Country Link
JP (1) JPS5981054A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5885140A (en) * 1996-05-29 1999-03-23 Speedfam Co., Ltd. Single-side abrasion apparatus with dresser
US6338672B1 (en) * 1998-12-21 2002-01-15 White Hydraulics, Inc. Dressing wheel system
JP2008137153A (ja) * 2008-01-28 2008-06-19 Sumitomo Metal Fine Technology Co Ltd 両面研摩装置並びにこれに使用されるブラシ及びドレッサ
US8002610B2 (en) 1999-05-17 2011-08-23 Sumitomo Mitsubishi Silicon Corporation Double side polishing method and apparatus
US20140143962A1 (en) * 2012-11-27 2014-05-29 Techtronic Floor Care Technology Limited Brush head for an electric toothbrush
CN107520754A (zh) * 2017-08-11 2017-12-29 郑州磨料磨具磨削研究所有限公司 一种研磨机清洗机构

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5885140A (en) * 1996-05-29 1999-03-23 Speedfam Co., Ltd. Single-side abrasion apparatus with dresser
US6338672B1 (en) * 1998-12-21 2002-01-15 White Hydraulics, Inc. Dressing wheel system
US7101264B2 (en) 1998-12-21 2006-09-05 White Drive Products, Inc. Dressing wheel system
US8002610B2 (en) 1999-05-17 2011-08-23 Sumitomo Mitsubishi Silicon Corporation Double side polishing method and apparatus
JP2008137153A (ja) * 2008-01-28 2008-06-19 Sumitomo Metal Fine Technology Co Ltd 両面研摩装置並びにこれに使用されるブラシ及びドレッサ
US20140143962A1 (en) * 2012-11-27 2014-05-29 Techtronic Floor Care Technology Limited Brush head for an electric toothbrush
US8966698B2 (en) * 2012-11-27 2015-03-03 Techtronic Floor Care Technology Limited Brush head for an electric toothbrush
CN107520754A (zh) * 2017-08-11 2017-12-29 郑州磨料磨具磨削研究所有限公司 一种研磨机清洗机构

Also Published As

Publication number Publication date
JPH0234746B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-08-06

Similar Documents

Publication Publication Date Title
HK1054815A1 (en) Polishing tool, polishing method and apparatus using the polishing tool
JPH10312984A (ja) 半導体ウェーハを清浄にする装置用工具
JPS5981054A (ja) 研磨布クリーニング方法
TW201010800A (en) Substrate cleaning device
JP2000127029A (ja) 研磨装置
JP2016215342A (ja) ウェーハの回収方法及び両面研磨装置
JPS6218369Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH09215644A (ja) 自動床洗浄機
JPH0212041Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP2858239B2 (ja) 研磨治具の清浄装置
JPH11285963A (ja) ウェーハ研磨用研磨布若しくは研磨定盤からなる研磨体及び該研磨体を用いたウェーハ研磨方法
JP2813545B2 (ja) 清掃装置
JPH059229B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CN220806906U (zh) 一种监测器用电阻片高效率磨片游轮工装
JPH0528759Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0522201Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP2000189908A6 (ja) カラーコーン洗浄機
CN211441817U (zh) 一种油画笔清洗装置
JPS6316626A (ja) 半導体装置の製造方法
US20050079811A1 (en) Defect reduction using pad conditioner cleaning
JP2006012980A (ja) 基板の両面研磨方法及びその装置
JPS6040304Y2 (ja) 平面研削装置
JPS6144638Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH07204473A (ja) 回転濾過装置
WO1998000050A1 (fr) Procede et appareil de meulage des extremites des soies d'une brosse