JPS6218369Y2 - - Google Patents
Info
- Publication number
- JPS6218369Y2 JPS6218369Y2 JP1982134247U JP13424782U JPS6218369Y2 JP S6218369 Y2 JPS6218369 Y2 JP S6218369Y2 JP 1982134247 U JP1982134247 U JP 1982134247U JP 13424782 U JP13424782 U JP 13424782U JP S6218369 Y2 JPS6218369 Y2 JP S6218369Y2
- Authority
- JP
- Japan
- Prior art keywords
- brush
- surface plate
- abrasive cloth
- brush body
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004744 fabric Substances 0.000 claims description 27
- 238000005498 polishing Methods 0.000 claims description 24
- 238000004140 cleaning Methods 0.000 claims description 9
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 230000001680 brushing effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000004745 nonwoven fabric Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000008119 colloidal silica Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982134247U JPS5939163U (ja) | 1982-09-06 | 1982-09-06 | 研摩布クリ−ニング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1982134247U JPS5939163U (ja) | 1982-09-06 | 1982-09-06 | 研摩布クリ−ニング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5939163U JPS5939163U (ja) | 1984-03-13 |
| JPS6218369Y2 true JPS6218369Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-05-12 |
Family
ID=30302552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1982134247U Granted JPS5939163U (ja) | 1982-09-06 | 1982-09-06 | 研摩布クリ−ニング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5939163U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002307292A (ja) * | 2001-04-11 | 2002-10-23 | Dowa Mining Co Ltd | 研磨布のドレッシング装置およびドレッシング方法 |
| JP4584755B2 (ja) * | 2005-04-06 | 2010-11-24 | スピードファム株式会社 | 両面研磨装置における研磨パッド貼着用加圧ローラ及び加圧ローラによる研磨パッドの貼着方法 |
-
1982
- 1982-09-06 JP JP1982134247U patent/JPS5939163U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5939163U (ja) | 1984-03-13 |