JPH0228847U - - Google Patents
Info
- Publication number
- JPH0228847U JPH0228847U JP10699288U JP10699288U JPH0228847U JP H0228847 U JPH0228847 U JP H0228847U JP 10699288 U JP10699288 U JP 10699288U JP 10699288 U JP10699288 U JP 10699288U JP H0228847 U JPH0228847 U JP H0228847U
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- spline
- guide rail
- bearing plate
- sliding table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003028 elevating effect Effects 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 4
- 230000013011 mating Effects 0.000 claims 1
- 210000000078 claw Anatomy 0.000 description 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10699288U JPH0617787Y2 (ja) | 1988-08-15 | 1988-08-15 | 基板搬送装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10699288U JPH0617787Y2 (ja) | 1988-08-15 | 1988-08-15 | 基板搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0228847U true JPH0228847U (cs) | 1990-02-23 |
JPH0617787Y2 JPH0617787Y2 (ja) | 1994-05-11 |
Family
ID=31340998
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10699288U Expired - Lifetime JPH0617787Y2 (ja) | 1988-08-15 | 1988-08-15 | 基板搬送装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0617787Y2 (cs) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016055393A (ja) * | 2014-09-11 | 2016-04-21 | 株式会社Taiyo | 電動グリッパ装置 |
JP2016055384A (ja) * | 2014-09-10 | 2016-04-21 | 株式会社Taiyo | 電動グリッパ装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1999028220A1 (fr) * | 1997-12-03 | 1999-06-10 | Nikon Corporation | Dispositif et procede de transfert de substrats |
-
1988
- 1988-08-15 JP JP10699288U patent/JPH0617787Y2/ja not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016055384A (ja) * | 2014-09-10 | 2016-04-21 | 株式会社Taiyo | 電動グリッパ装置 |
JP2016055393A (ja) * | 2014-09-11 | 2016-04-21 | 株式会社Taiyo | 電動グリッパ装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0617787Y2 (ja) | 1994-05-11 |
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