JPH022308B2 - - Google Patents

Info

Publication number
JPH022308B2
JPH022308B2 JP54133565A JP13356579A JPH022308B2 JP H022308 B2 JPH022308 B2 JP H022308B2 JP 54133565 A JP54133565 A JP 54133565A JP 13356579 A JP13356579 A JP 13356579A JP H022308 B2 JPH022308 B2 JP H022308B2
Authority
JP
Japan
Prior art keywords
layer
semiconductor
film
mis
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP54133565A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5658268A (en
Inventor
Koichiro Ootori
Yoshio Miura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP13356579A priority Critical patent/JPS5658268A/ja
Publication of JPS5658268A publication Critical patent/JPS5658268A/ja
Publication of JPH022308B2 publication Critical patent/JPH022308B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Recrystallisation Techniques (AREA)
JP13356579A 1979-10-18 1979-10-18 Semiconductor device Granted JPS5658268A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13356579A JPS5658268A (en) 1979-10-18 1979-10-18 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13356579A JPS5658268A (en) 1979-10-18 1979-10-18 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS5658268A JPS5658268A (en) 1981-05-21
JPH022308B2 true JPH022308B2 (enrdf_load_stackoverflow) 1990-01-17

Family

ID=15107767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13356579A Granted JPS5658268A (en) 1979-10-18 1979-10-18 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS5658268A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4816847A (en) * 1988-02-08 1989-03-28 The Gerber Scientific Instrument Company High resonance drive table and method of making a planar work surface

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS503787A (enrdf_load_stackoverflow) * 1973-05-16 1975-01-16

Also Published As

Publication number Publication date
JPS5658268A (en) 1981-05-21

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