JPH0221740U - - Google Patents

Info

Publication number
JPH0221740U
JPH0221740U JP10025688U JP10025688U JPH0221740U JP H0221740 U JPH0221740 U JP H0221740U JP 10025688 U JP10025688 U JP 10025688U JP 10025688 U JP10025688 U JP 10025688U JP H0221740 U JPH0221740 U JP H0221740U
Authority
JP
Japan
Prior art keywords
loop
shaped conveyor
thin film
substrates
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10025688U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10025688U priority Critical patent/JPH0221740U/ja
Publication of JPH0221740U publication Critical patent/JPH0221740U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Liquid Crystal (AREA)
JP10025688U 1988-07-28 1988-07-28 Pending JPH0221740U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10025688U JPH0221740U (OSRAM) 1988-07-28 1988-07-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10025688U JPH0221740U (OSRAM) 1988-07-28 1988-07-28

Publications (1)

Publication Number Publication Date
JPH0221740U true JPH0221740U (OSRAM) 1990-02-14

Family

ID=31328175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10025688U Pending JPH0221740U (OSRAM) 1988-07-28 1988-07-28

Country Status (1)

Country Link
JP (1) JPH0221740U (OSRAM)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005228771A (ja) * 2004-02-10 2005-08-25 Shinko Electric Co Ltd 基板搬送方法、及びその装置
JP2009515368A (ja) * 2005-11-07 2009-04-09 ブルックス オートメーション インコーポレイテッド 小容積キャリヤ搬送体、積載ポート、バッファーシステム
JP2009537075A (ja) * 2006-05-11 2009-10-22 ブルックス オートメーション インコーポレイテッド 低減容量キャリア、搬送機、積載ポート、緩衝装置システム
JP2014123660A (ja) * 2012-12-21 2014-07-03 Senju Metal Ind Co Ltd 搬送処理システム

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005228771A (ja) * 2004-02-10 2005-08-25 Shinko Electric Co Ltd 基板搬送方法、及びその装置
JP2009515368A (ja) * 2005-11-07 2009-04-09 ブルックス オートメーション インコーポレイテッド 小容積キャリヤ搬送体、積載ポート、バッファーシステム
JP2009537075A (ja) * 2006-05-11 2009-10-22 ブルックス オートメーション インコーポレイテッド 低減容量キャリア、搬送機、積載ポート、緩衝装置システム
JP2014123660A (ja) * 2012-12-21 2014-07-03 Senju Metal Ind Co Ltd 搬送処理システム

Similar Documents

Publication Publication Date Title
DE2966176D1 (en) Article comprising a substrate and an overlying processing layer of actinic radiation-sensitive material and process for fabrication of the article
JPS54154289A (en) Manufacture of thin-film transistor array
KR890004408A (ko) 반도체장치 제조시에 기판상에 형성되는 레지스트층의 애슁법
JPH11233687A5 (OSRAM)
EP0724292A3 (en) Method for forming multilevel interconnections in a semiconductor device
JPH0221740U (OSRAM)
JPH0229527U (OSRAM)
JPS5299085A (en) Production of semiconductor device
JPS6459936A (en) Manufacture of integrated circuit
JPS57167659A (en) Manufacture of semiconductor device
JPS5636120A (en) Manufacture of magnetic bubble device
JPS63157054U (OSRAM)
JPH03154214A (ja) 導体パターン形成方法と磁気ヘッドの製造方法
JP2982202B2 (ja) 半導体装置の製造方法
JP2946102B2 (ja) パターン形成方法
JPS62216268A (ja) 半導体装置の製造方法
JPS57170524A (en) Manufacture of semiconductor device
JPS568834A (en) Manufacture of projection for substrate conductor layer
JPS6450540A (en) Isolation of microelement
JPH0715137Y2 (ja) ウエハー保持装置
JPS5696845A (en) Manufacture of semiconductor device
JPS57192048A (en) Manufacture of semiconductor device
JPS56130951A (en) Manufacture of semiconductor device
JPS57199238A (en) Manufacture of semiconductor device
JPS62133723A (ja) 半導体装置の製造方法