JPS5636120A - Manufacture of magnetic bubble device - Google Patents

Manufacture of magnetic bubble device

Info

Publication number
JPS5636120A
JPS5636120A JP11225879A JP11225879A JPS5636120A JP S5636120 A JPS5636120 A JP S5636120A JP 11225879 A JP11225879 A JP 11225879A JP 11225879 A JP11225879 A JP 11225879A JP S5636120 A JPS5636120 A JP S5636120A
Authority
JP
Japan
Prior art keywords
pattern
film
layer film
location matching
flatness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11225879A
Other languages
Japanese (ja)
Other versions
JPS6246967B2 (en
Inventor
Yoshio Sato
Tsutomu Miyashita
Koei Kamishiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11225879A priority Critical patent/JPS5636120A/en
Publication of JPS5636120A publication Critical patent/JPS5636120A/en
Publication of JPS6246967B2 publication Critical patent/JPS6246967B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/32—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film
    • H01F41/34—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film in patterns, e.g. by lithography

Abstract

PURPOSE:To improve a location matching of a transfer circuit pattern and a multilayer pattern, and the flatness of a surface by a method wherein an ion implantation is performed on a metal mask pattern of 2 layers, upper and lower, the multilayer pattern is formed after the etching of the upper layer film leaving the lower layer film. CONSTITUTION:The transfer circuit pattern is formed by the mask laminated 2 kinds of metal such as a thin Ti film2, a thick Au film 3 on a crystalline substrate for the magnetic buble, an ion implatatation layer 5 is formed on the substrate other than the pattern by the ion implantation method. Next thereto, the upper layer film 3 is removed by etching leaving the lower layer film 2, an Si2O film 6 is coated thereupon, an Au film of a gate material 7 is deposited thereupon, and a photoregist 8 is coated to perform the location matching of the conductive pattern. In this case, only a slight step differnce is generated but the relative location matching can be throughly made and the flatness of the surface can be also made so well.
JP11225879A 1979-09-01 1979-09-01 Manufacture of magnetic bubble device Granted JPS5636120A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11225879A JPS5636120A (en) 1979-09-01 1979-09-01 Manufacture of magnetic bubble device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11225879A JPS5636120A (en) 1979-09-01 1979-09-01 Manufacture of magnetic bubble device

Publications (2)

Publication Number Publication Date
JPS5636120A true JPS5636120A (en) 1981-04-09
JPS6246967B2 JPS6246967B2 (en) 1987-10-06

Family

ID=14582195

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11225879A Granted JPS5636120A (en) 1979-09-01 1979-09-01 Manufacture of magnetic bubble device

Country Status (1)

Country Link
JP (1) JPS5636120A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5716956U (en) * 1980-06-30 1982-01-28

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5716956U (en) * 1980-06-30 1982-01-28

Also Published As

Publication number Publication date
JPS6246967B2 (en) 1987-10-06

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