JPS5745289A - Production of multidimentional semiconductor device - Google Patents

Production of multidimentional semiconductor device

Info

Publication number
JPS5745289A
JPS5745289A JP55120371A JP12037180A JPS5745289A JP S5745289 A JPS5745289 A JP S5745289A JP 55120371 A JP55120371 A JP 55120371A JP 12037180 A JP12037180 A JP 12037180A JP S5745289 A JPS5745289 A JP S5745289A
Authority
JP
Japan
Prior art keywords
substrate
etching
zns film
ion
selectively
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55120371A
Other languages
Japanese (ja)
Inventor
Mitsuo Yoshikawa
Hiroshi Takigawa
Michiharu Ito
Shigeki Hamashima
Tomoshi Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55120371A priority Critical patent/JPS5745289A/en
Publication of JPS5745289A publication Critical patent/JPS5745289A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/1446—Devices controlled by radiation in a repetitive configuration

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Light Receiving Elements (AREA)
  • Solid State Image Pick-Up Elements (AREA)

Abstract

PURPOSE:To facilitate the subsequent mask matching remarkably by interposing a process of selectively etching the surface of a substrate between a process of selectively doping impurities and a process of mounting electrodes. CONSTITUTION:A ZnS film 2 is formed over the entire surface of a substrate as a sheet plate 1 of a P type HgCdTe with a clean flat surface. Then, the ZnS film 2 is selectively etched away to form a window for ion implantation and then, the surface of the substrate exposed in the hole is scraped by about 1,000Angstrom in the thickness by etching. Then, N type layers 41, 42... are formed by implantation of a donner ion, for example, boron ion. Then, once the ZnS film 2 is removed entirely, a new ZnS film is applied over the entire surface of the substrate to form an insulation film 5 and a hole for mounting electrodes by positioning a mask based on the steps generated by etching. Finally, metal layers 61, 62... are applied by coating.
JP55120371A 1980-08-29 1980-08-29 Production of multidimentional semiconductor device Pending JPS5745289A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55120371A JPS5745289A (en) 1980-08-29 1980-08-29 Production of multidimentional semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55120371A JPS5745289A (en) 1980-08-29 1980-08-29 Production of multidimentional semiconductor device

Publications (1)

Publication Number Publication Date
JPS5745289A true JPS5745289A (en) 1982-03-15

Family

ID=14784537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55120371A Pending JPS5745289A (en) 1980-08-29 1980-08-29 Production of multidimentional semiconductor device

Country Status (1)

Country Link
JP (1) JPS5745289A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62118152U (en) * 1986-01-21 1987-07-27
US11434953B2 (en) 2017-11-27 2022-09-06 Ntn Corporation Electric actuator

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5136088A (en) * 1974-08-06 1976-03-26 Telecommunications Sa
JPS5177077A (en) * 1974-12-27 1976-07-03 Suwa Seikosha Kk Handotaisochino seizohoho

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5136088A (en) * 1974-08-06 1976-03-26 Telecommunications Sa
JPS5177077A (en) * 1974-12-27 1976-07-03 Suwa Seikosha Kk Handotaisochino seizohoho

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62118152U (en) * 1986-01-21 1987-07-27
JPS6342108Y2 (en) * 1986-01-21 1988-11-04
US11434953B2 (en) 2017-11-27 2022-09-06 Ntn Corporation Electric actuator

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