JPH0219969B2 - - Google Patents

Info

Publication number
JPH0219969B2
JPH0219969B2 JP57085677A JP8567782A JPH0219969B2 JP H0219969 B2 JPH0219969 B2 JP H0219969B2 JP 57085677 A JP57085677 A JP 57085677A JP 8567782 A JP8567782 A JP 8567782A JP H0219969 B2 JPH0219969 B2 JP H0219969B2
Authority
JP
Japan
Prior art keywords
wafer
processing
opening
wire conveyor
plasma reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57085677A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5840828A (ja
Inventor
Akira Uehara
Hiroyuki Kyota
Juichi Myazaki
Hisashi Nakane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Ohka Kogyo Co Ltd
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Priority to JP8567782A priority Critical patent/JPS5840828A/ja
Publication of JPS5840828A publication Critical patent/JPS5840828A/ja
Publication of JPH0219969B2 publication Critical patent/JPH0219969B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Feeding Of Workpieces (AREA)
  • Structure Of Belt Conveyors (AREA)
  • Framework For Endless Conveyors (AREA)
  • Drying Of Semiconductors (AREA)
  • Automatic Assembly (AREA)
JP8567782A 1982-05-22 1982-05-22 自動枚葉処理型プラズマ反応処理装置 Granted JPS5840828A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8567782A JPS5840828A (ja) 1982-05-22 1982-05-22 自動枚葉処理型プラズマ反応処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8567782A JPS5840828A (ja) 1982-05-22 1982-05-22 自動枚葉処理型プラズマ反応処理装置

Publications (2)

Publication Number Publication Date
JPS5840828A JPS5840828A (ja) 1983-03-09
JPH0219969B2 true JPH0219969B2 (ko) 1990-05-07

Family

ID=13865459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8567782A Granted JPS5840828A (ja) 1982-05-22 1982-05-22 自動枚葉処理型プラズマ反応処理装置

Country Status (1)

Country Link
JP (1) JPS5840828A (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0616488B2 (ja) * 1985-12-02 1994-03-02 東芝機械株式会社 半導体製造装置
JP2544145Y2 (ja) * 1988-03-31 1997-08-13 株式会社南雲製作所 プリント基板の自動面取り装置
JP3297831B2 (ja) * 1994-12-29 2002-07-02 ソニー株式会社 搬送装置
JP6379017B2 (ja) * 2014-11-20 2018-08-22 東京技研工業株式会社 ワイヤー搬送装置用間隔調整具

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5421174A (en) * 1977-07-18 1979-02-17 Tokyo Ouka Kougiyou Kk Plasma reaction processor
JPS5457867A (en) * 1977-10-17 1979-05-10 Nichiden Varian Kk Vacuum processor with automatic wafer feeder

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5421174A (en) * 1977-07-18 1979-02-17 Tokyo Ouka Kougiyou Kk Plasma reaction processor
JPS5457867A (en) * 1977-10-17 1979-05-10 Nichiden Varian Kk Vacuum processor with automatic wafer feeder

Also Published As

Publication number Publication date
JPS5840828A (ja) 1983-03-09

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