JPS5421174A - Plasma reaction processor - Google Patents

Plasma reaction processor

Info

Publication number
JPS5421174A
JPS5421174A JP8587977A JP8587977A JPS5421174A JP S5421174 A JPS5421174 A JP S5421174A JP 8587977 A JP8587977 A JP 8587977A JP 8587977 A JP8587977 A JP 8587977A JP S5421174 A JPS5421174 A JP S5421174A
Authority
JP
Japan
Prior art keywords
plasma reaction
reaction processor
processor
plasma
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8587977A
Other languages
Japanese (ja)
Other versions
JPS5620697B2 (en
Inventor
Akira Uehara
Hisashi Nakane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TOKYO OUKA KOUGIYOU KK
Original Assignee
TOKYO OUKA KOUGIYOU KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TOKYO OUKA KOUGIYOU KK filed Critical TOKYO OUKA KOUGIYOU KK
Priority to JP8587977A priority Critical patent/JPS5421174A/en
Priority to US05/916,252 priority patent/US4208159A/en
Publication of JPS5421174A publication Critical patent/JPS5421174A/en
Publication of JPS5620697B2 publication Critical patent/JPS5620697B2/ja
Granted legal-status Critical Current

Links

JP8587977A 1977-07-18 1977-07-18 Plasma reaction processor Granted JPS5421174A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP8587977A JPS5421174A (en) 1977-07-18 1977-07-18 Plasma reaction processor
US05/916,252 US4208159A (en) 1977-07-18 1978-06-16 Apparatus for the treatment of a wafer by plasma reaction

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8587977A JPS5421174A (en) 1977-07-18 1977-07-18 Plasma reaction processor

Publications (2)

Publication Number Publication Date
JPS5421174A true JPS5421174A (en) 1979-02-17
JPS5620697B2 JPS5620697B2 (en) 1981-05-15

Family

ID=13871180

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8587977A Granted JPS5421174A (en) 1977-07-18 1977-07-18 Plasma reaction processor

Country Status (1)

Country Link
JP (1) JPS5421174A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5840828A (en) * 1982-05-22 1983-03-09 Tokyo Denshi Kagaku Kabushiki Automatic sheet fed type plasma reaction treatment device
JPS6020515A (en) * 1983-07-14 1985-02-01 Ulvac Corp Sputtering etching device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6161696A (en) * 1984-08-30 1986-03-29 Fuji Oil Co Ltd Air diffuser pipe

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5178691A (en) * 1974-12-28 1976-07-08 Sony Corp UEHAKYOKYUSOCHI

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5178691A (en) * 1974-12-28 1976-07-08 Sony Corp UEHAKYOKYUSOCHI

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5840828A (en) * 1982-05-22 1983-03-09 Tokyo Denshi Kagaku Kabushiki Automatic sheet fed type plasma reaction treatment device
JPH0219969B2 (en) * 1982-05-22 1990-05-07 Tokyo Ohka Kogyo Co Ltd
JPS6020515A (en) * 1983-07-14 1985-02-01 Ulvac Corp Sputtering etching device
JPH0352216B2 (en) * 1983-07-14 1991-08-09 Ulvac Corp

Also Published As

Publication number Publication date
JPS5620697B2 (en) 1981-05-15

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