JPS5421174A - Plasma reaction processor - Google Patents
Plasma reaction processorInfo
- Publication number
- JPS5421174A JPS5421174A JP8587977A JP8587977A JPS5421174A JP S5421174 A JPS5421174 A JP S5421174A JP 8587977 A JP8587977 A JP 8587977A JP 8587977 A JP8587977 A JP 8587977A JP S5421174 A JPS5421174 A JP S5421174A
- Authority
- JP
- Japan
- Prior art keywords
- plasma reaction
- reaction processor
- processor
- plasma
- reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8587977A JPS5421174A (en) | 1977-07-18 | 1977-07-18 | Plasma reaction processor |
US05/916,252 US4208159A (en) | 1977-07-18 | 1978-06-16 | Apparatus for the treatment of a wafer by plasma reaction |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8587977A JPS5421174A (en) | 1977-07-18 | 1977-07-18 | Plasma reaction processor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5421174A true JPS5421174A (en) | 1979-02-17 |
JPS5620697B2 JPS5620697B2 (en) | 1981-05-15 |
Family
ID=13871180
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8587977A Granted JPS5421174A (en) | 1977-07-18 | 1977-07-18 | Plasma reaction processor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5421174A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5840828A (en) * | 1982-05-22 | 1983-03-09 | Tokyo Denshi Kagaku Kabushiki | Automatic sheet fed type plasma reaction treatment device |
JPS6020515A (en) * | 1983-07-14 | 1985-02-01 | Ulvac Corp | Sputtering etching device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6161696A (en) * | 1984-08-30 | 1986-03-29 | Fuji Oil Co Ltd | Air diffuser pipe |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5178691A (en) * | 1974-12-28 | 1976-07-08 | Sony Corp | UEHAKYOKYUSOCHI |
-
1977
- 1977-07-18 JP JP8587977A patent/JPS5421174A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5178691A (en) * | 1974-12-28 | 1976-07-08 | Sony Corp | UEHAKYOKYUSOCHI |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5840828A (en) * | 1982-05-22 | 1983-03-09 | Tokyo Denshi Kagaku Kabushiki | Automatic sheet fed type plasma reaction treatment device |
JPH0219969B2 (en) * | 1982-05-22 | 1990-05-07 | Tokyo Ohka Kogyo Co Ltd | |
JPS6020515A (en) * | 1983-07-14 | 1985-02-01 | Ulvac Corp | Sputtering etching device |
JPH0352216B2 (en) * | 1983-07-14 | 1991-08-09 | Ulvac Corp |
Also Published As
Publication number | Publication date |
---|---|
JPS5620697B2 (en) | 1981-05-15 |
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