JPH02172832A - 合成石英ガラスおよびその製造方法 - Google Patents

合成石英ガラスおよびその製造方法

Info

Publication number
JPH02172832A
JPH02172832A JP32562688A JP32562688A JPH02172832A JP H02172832 A JPH02172832 A JP H02172832A JP 32562688 A JP32562688 A JP 32562688A JP 32562688 A JP32562688 A JP 32562688A JP H02172832 A JPH02172832 A JP H02172832A
Authority
JP
Japan
Prior art keywords
quartz glass
synthetic quartz
glass
nitrogen
ammonia
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP32562688A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0450263B2 (enrdf_load_stackoverflow
Inventor
Masatoshi Takita
滝田　政俊
Takaaki Shimizu
孝明 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP32562688A priority Critical patent/JPH02172832A/ja
Priority to US07/404,585 priority patent/US4979973A/en
Priority to EP89402471A priority patent/EP0360659B1/en
Priority to DE8989402471T priority patent/DE68905735T2/de
Publication of JPH02172832A publication Critical patent/JPH02172832A/ja
Publication of JPH0450263B2 publication Critical patent/JPH0450263B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Glass Melting And Manufacturing (AREA)
  • Glass Compositions (AREA)
JP32562688A 1988-09-13 1988-12-22 合成石英ガラスおよびその製造方法 Granted JPH02172832A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP32562688A JPH02172832A (ja) 1988-12-22 1988-12-22 合成石英ガラスおよびその製造方法
US07/404,585 US4979973A (en) 1988-09-13 1989-09-08 Preparation of fused silica glass by hydrolysis of methyl silicate
EP89402471A EP0360659B1 (en) 1988-09-13 1989-09-11 Synthetic fused silica glass and method for the preparation thereof
DE8989402471T DE68905735T2 (de) 1988-09-13 1989-09-11 Synthetisches geschmolzenes quarzglas und verfahren zu dessen herstellung.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32562688A JPH02172832A (ja) 1988-12-22 1988-12-22 合成石英ガラスおよびその製造方法

Publications (2)

Publication Number Publication Date
JPH02172832A true JPH02172832A (ja) 1990-07-04
JPH0450263B2 JPH0450263B2 (enrdf_load_stackoverflow) 1992-08-13

Family

ID=18178958

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32562688A Granted JPH02172832A (ja) 1988-09-13 1988-12-22 合成石英ガラスおよびその製造方法

Country Status (1)

Country Link
JP (1) JPH02172832A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0340929A (ja) * 1989-07-06 1991-02-21 Shinetsu Sekiei Kk 耐熱性及び加工性の優れた合成石英ガラス部材の製造方法
JPH0394843A (ja) * 1989-09-04 1991-04-19 Shin Etsu Chem Co Ltd 合成石英ガラスるつぼおよびその製造方法
EP1026289A4 (en) * 1998-07-31 2008-12-24 Shinetsu Quartz Prod QUARTZ GLASS LEVER FOR PULLING SILICONE INK CRYSTALS AND METHOD FOR THE PRODUCTION THEREOF

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0340929A (ja) * 1989-07-06 1991-02-21 Shinetsu Sekiei Kk 耐熱性及び加工性の優れた合成石英ガラス部材の製造方法
JPH0394843A (ja) * 1989-09-04 1991-04-19 Shin Etsu Chem Co Ltd 合成石英ガラスるつぼおよびその製造方法
EP1026289A4 (en) * 1998-07-31 2008-12-24 Shinetsu Quartz Prod QUARTZ GLASS LEVER FOR PULLING SILICONE INK CRYSTALS AND METHOD FOR THE PRODUCTION THEREOF

Also Published As

Publication number Publication date
JPH0450263B2 (enrdf_load_stackoverflow) 1992-08-13

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