JPH0214807B2 - - Google Patents
Info
- Publication number
- JPH0214807B2 JPH0214807B2 JP12182982A JP12182982A JPH0214807B2 JP H0214807 B2 JPH0214807 B2 JP H0214807B2 JP 12182982 A JP12182982 A JP 12182982A JP 12182982 A JP12182982 A JP 12182982A JP H0214807 B2 JPH0214807 B2 JP H0214807B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- piezoelectric
- electrode
- film
- ink
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 25
- 239000000919 ceramic Substances 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 230000010287 polarization Effects 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000615 nonconductor Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12182982A JPS5912614A (ja) | 1982-07-12 | 1982-07-12 | 抵抗を有する圧電振動部品の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12182982A JPS5912614A (ja) | 1982-07-12 | 1982-07-12 | 抵抗を有する圧電振動部品の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5912614A JPS5912614A (ja) | 1984-01-23 |
| JPH0214807B2 true JPH0214807B2 (enExample) | 1990-04-10 |
Family
ID=14820954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12182982A Granted JPS5912614A (ja) | 1982-07-12 | 1982-07-12 | 抵抗を有する圧電振動部品の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5912614A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0439715U (enExample) * | 1990-07-31 | 1992-04-03 |
-
1982
- 1982-07-12 JP JP12182982A patent/JPS5912614A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5912614A (ja) | 1984-01-23 |
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