JPS5912614A - 抵抗を有する圧電振動部品の製造方法 - Google Patents
抵抗を有する圧電振動部品の製造方法Info
- Publication number
- JPS5912614A JPS5912614A JP12182982A JP12182982A JPS5912614A JP S5912614 A JPS5912614 A JP S5912614A JP 12182982 A JP12182982 A JP 12182982A JP 12182982 A JP12182982 A JP 12182982A JP S5912614 A JPS5912614 A JP S5912614A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- piezoelectric
- resistance film
- resistance
- ink
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 239000000919 ceramic Substances 0.000 claims abstract description 6
- 230000010287 polarization Effects 0.000 claims abstract description 4
- 238000005530 etching Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000000926 separation method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 229910052573 porcelain Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 239000000615 nonconductor Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12182982A JPS5912614A (ja) | 1982-07-12 | 1982-07-12 | 抵抗を有する圧電振動部品の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12182982A JPS5912614A (ja) | 1982-07-12 | 1982-07-12 | 抵抗を有する圧電振動部品の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5912614A true JPS5912614A (ja) | 1984-01-23 |
| JPH0214807B2 JPH0214807B2 (enExample) | 1990-04-10 |
Family
ID=14820954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12182982A Granted JPS5912614A (ja) | 1982-07-12 | 1982-07-12 | 抵抗を有する圧電振動部品の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5912614A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0439715U (enExample) * | 1990-07-31 | 1992-04-03 |
-
1982
- 1982-07-12 JP JP12182982A patent/JPS5912614A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0439715U (enExample) * | 1990-07-31 | 1992-04-03 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0214807B2 (enExample) | 1990-04-10 |
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