JPH019169Y2 - - Google Patents
Info
- Publication number
- JPH019169Y2 JPH019169Y2 JP4239386U JP4239386U JPH019169Y2 JP H019169 Y2 JPH019169 Y2 JP H019169Y2 JP 4239386 U JP4239386 U JP 4239386U JP 4239386 U JP4239386 U JP 4239386U JP H019169 Y2 JPH019169 Y2 JP H019169Y2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chuck
- groove
- wafer
- vacuum
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 description 33
- 239000007788 liquid Substances 0.000 description 20
- 230000002093 peripheral effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000003513 alkali Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Registering Or Overturning Sheets (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4239386U JPH019169Y2 (ko) | 1986-03-25 | 1986-03-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4239386U JPH019169Y2 (ko) | 1986-03-25 | 1986-03-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62154648U JPS62154648U (ko) | 1987-10-01 |
| JPH019169Y2 true JPH019169Y2 (ko) | 1989-03-13 |
Family
ID=30858258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4239386U Expired JPH019169Y2 (ko) | 1986-03-25 | 1986-03-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH019169Y2 (ko) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4616731B2 (ja) * | 2005-09-01 | 2011-01-19 | 東京エレクトロン株式会社 | 塗布、現像装置 |
| JP5976312B2 (ja) * | 2011-12-22 | 2016-08-23 | 株式会社ディスコ | ウェーハ保持装置 |
-
1986
- 1986-03-25 JP JP4239386U patent/JPH019169Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62154648U (ko) | 1987-10-01 |
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