JPS62154648U - - Google Patents
Info
- Publication number
- JPS62154648U JPS62154648U JP4239386U JP4239386U JPS62154648U JP S62154648 U JPS62154648 U JP S62154648U JP 4239386 U JP4239386 U JP 4239386U JP 4239386 U JP4239386 U JP 4239386U JP S62154648 U JPS62154648 U JP S62154648U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chuck
- groove
- groove along
- outer periphery
- plate body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Registering Or Overturning Sheets (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4239386U JPH019169Y2 (ko) | 1986-03-25 | 1986-03-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4239386U JPH019169Y2 (ko) | 1986-03-25 | 1986-03-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62154648U true JPS62154648U (ko) | 1987-10-01 |
| JPH019169Y2 JPH019169Y2 (ko) | 1989-03-13 |
Family
ID=30858258
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4239386U Expired JPH019169Y2 (ko) | 1986-03-25 | 1986-03-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH019169Y2 (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007067303A (ja) * | 2005-09-01 | 2007-03-15 | Tokyo Electron Ltd | 基板搬送装置、基板搬送方法及び塗布、現像装置 |
| JP2013131709A (ja) * | 2011-12-22 | 2013-07-04 | Disco Abrasive Syst Ltd | ウェーハ保持装置 |
-
1986
- 1986-03-25 JP JP4239386U patent/JPH019169Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007067303A (ja) * | 2005-09-01 | 2007-03-15 | Tokyo Electron Ltd | 基板搬送装置、基板搬送方法及び塗布、現像装置 |
| JP4616731B2 (ja) * | 2005-09-01 | 2011-01-19 | 東京エレクトロン株式会社 | 塗布、現像装置 |
| JP2013131709A (ja) * | 2011-12-22 | 2013-07-04 | Disco Abrasive Syst Ltd | ウェーハ保持装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH019169Y2 (ko) | 1989-03-13 |