JPH0150098B2 - - Google Patents

Info

Publication number
JPH0150098B2
JPH0150098B2 JP58020593A JP2059383A JPH0150098B2 JP H0150098 B2 JPH0150098 B2 JP H0150098B2 JP 58020593 A JP58020593 A JP 58020593A JP 2059383 A JP2059383 A JP 2059383A JP H0150098 B2 JPH0150098 B2 JP H0150098B2
Authority
JP
Japan
Prior art keywords
film
titanium
metal
diffusion layer
silicide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58020593A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59150421A (ja
Inventor
Katsuya Okumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP58020593A priority Critical patent/JPS59150421A/ja
Publication of JPS59150421A publication Critical patent/JPS59150421A/ja
Publication of JPH0150098B2 publication Critical patent/JPH0150098B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10D64/011—

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP58020593A 1983-02-10 1983-02-10 半導体装置の製造方法 Granted JPS59150421A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58020593A JPS59150421A (ja) 1983-02-10 1983-02-10 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58020593A JPS59150421A (ja) 1983-02-10 1983-02-10 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS59150421A JPS59150421A (ja) 1984-08-28
JPH0150098B2 true JPH0150098B2 (OSRAM) 1989-10-27

Family

ID=12031549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58020593A Granted JPS59150421A (ja) 1983-02-10 1983-02-10 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS59150421A (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6068612A (ja) * 1983-09-26 1985-04-19 Oki Electric Ind Co Ltd 半導体素子の製造方法
JP2598780B2 (ja) * 1986-04-07 1997-04-09 日本電装株式会社 半導体装置およびその製造方法
KR930004295B1 (ko) * 1988-12-24 1993-05-22 삼성전자 주식회사 Vlsi 장치의 n+ 및 p+ 저항영역에 저저항 접속방법
GB9105943D0 (en) * 1991-03-20 1991-05-08 Philips Nv A method of manufacturing a semiconductor device

Also Published As

Publication number Publication date
JPS59150421A (ja) 1984-08-28

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