JPH0143862Y2 - - Google Patents
Info
- Publication number
- JPH0143862Y2 JPH0143862Y2 JP13086984U JP13086984U JPH0143862Y2 JP H0143862 Y2 JPH0143862 Y2 JP H0143862Y2 JP 13086984 U JP13086984 U JP 13086984U JP 13086984 U JP13086984 U JP 13086984U JP H0143862 Y2 JPH0143862 Y2 JP H0143862Y2
- Authority
- JP
- Japan
- Prior art keywords
- container
- wafer
- rotating
- drying
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001035 drying Methods 0.000 claims description 29
- 238000007664 blowing Methods 0.000 claims description 7
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 54
- 239000004065 semiconductor Substances 0.000 description 20
- 239000007789 gas Substances 0.000 description 16
- 230000018044 dehydration Effects 0.000 description 7
- 238000006297 dehydration reaction Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 239000000969 carrier Substances 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000009423 ventilation Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005484 gravity Effects 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13086984U JPS6144831U (ja) | 1984-08-29 | 1984-08-29 | ウエ−ハ乾燥装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13086984U JPS6144831U (ja) | 1984-08-29 | 1984-08-29 | ウエ−ハ乾燥装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6144831U JPS6144831U (ja) | 1986-03-25 |
| JPH0143862Y2 true JPH0143862Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-12-19 |
Family
ID=30689461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13086984U Granted JPS6144831U (ja) | 1984-08-29 | 1984-08-29 | ウエ−ハ乾燥装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6144831U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0679843B2 (ja) * | 1987-04-01 | 1994-10-12 | 大建工業株式会社 | 耐摩耗性板材及びその製造方法 |
| JPH0195040A (ja) * | 1987-10-08 | 1989-04-13 | Kanazawa Jushi Kogyo Kk | 木材製構造用部材 |
-
1984
- 1984-08-29 JP JP13086984U patent/JPS6144831U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6144831U (ja) | 1986-03-25 |