JPH0132045Y2 - - Google Patents

Info

Publication number
JPH0132045Y2
JPH0132045Y2 JP1986047300U JP4730086U JPH0132045Y2 JP H0132045 Y2 JPH0132045 Y2 JP H0132045Y2 JP 1986047300 U JP1986047300 U JP 1986047300U JP 4730086 U JP4730086 U JP 4730086U JP H0132045 Y2 JPH0132045 Y2 JP H0132045Y2
Authority
JP
Japan
Prior art keywords
reticle
pattern
marks
alignment marks
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986047300U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62158449U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986047300U priority Critical patent/JPH0132045Y2/ja
Publication of JPS62158449U publication Critical patent/JPS62158449U/ja
Application granted granted Critical
Publication of JPH0132045Y2 publication Critical patent/JPH0132045Y2/ja
Expired legal-status Critical Current

Links

JP1986047300U 1986-03-31 1986-03-31 Expired JPH0132045Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986047300U JPH0132045Y2 (enrdf_load_stackoverflow) 1986-03-31 1986-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986047300U JPH0132045Y2 (enrdf_load_stackoverflow) 1986-03-31 1986-03-31

Publications (2)

Publication Number Publication Date
JPS62158449U JPS62158449U (enrdf_load_stackoverflow) 1987-10-08
JPH0132045Y2 true JPH0132045Y2 (enrdf_load_stackoverflow) 1989-10-02

Family

ID=30867775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986047300U Expired JPH0132045Y2 (enrdf_load_stackoverflow) 1986-03-31 1986-03-31

Country Status (1)

Country Link
JP (1) JPH0132045Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS62158449U (enrdf_load_stackoverflow) 1987-10-08

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