JPS62158449U - - Google Patents

Info

Publication number
JPS62158449U
JPS62158449U JP1986047300U JP4730086U JPS62158449U JP S62158449 U JPS62158449 U JP S62158449U JP 1986047300 U JP1986047300 U JP 1986047300U JP 4730086 U JP4730086 U JP 4730086U JP S62158449 U JPS62158449 U JP S62158449U
Authority
JP
Japan
Prior art keywords
reticle
marks
pattern
projection exposure
reduction projection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986047300U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0132045Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986047300U priority Critical patent/JPH0132045Y2/ja
Publication of JPS62158449U publication Critical patent/JPS62158449U/ja
Application granted granted Critical
Publication of JPH0132045Y2 publication Critical patent/JPH0132045Y2/ja
Expired legal-status Critical Current

Links

JP1986047300U 1986-03-31 1986-03-31 Expired JPH0132045Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986047300U JPH0132045Y2 (enrdf_load_stackoverflow) 1986-03-31 1986-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986047300U JPH0132045Y2 (enrdf_load_stackoverflow) 1986-03-31 1986-03-31

Publications (2)

Publication Number Publication Date
JPS62158449U true JPS62158449U (enrdf_load_stackoverflow) 1987-10-08
JPH0132045Y2 JPH0132045Y2 (enrdf_load_stackoverflow) 1989-10-02

Family

ID=30867775

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986047300U Expired JPH0132045Y2 (enrdf_load_stackoverflow) 1986-03-31 1986-03-31

Country Status (1)

Country Link
JP (1) JPH0132045Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0132045Y2 (enrdf_load_stackoverflow) 1989-10-02

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