JPH0129055B2 - - Google Patents
Info
- Publication number
- JPH0129055B2 JPH0129055B2 JP58001186A JP118683A JPH0129055B2 JP H0129055 B2 JPH0129055 B2 JP H0129055B2 JP 58001186 A JP58001186 A JP 58001186A JP 118683 A JP118683 A JP 118683A JP H0129055 B2 JPH0129055 B2 JP H0129055B2
- Authority
- JP
- Japan
- Prior art keywords
- cutting die
- layer
- coating layer
- deposited
- deposited layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010410 layer Substances 0.000 claims description 42
- 238000005520 cutting process Methods 0.000 claims description 40
- 238000000034 method Methods 0.000 claims description 25
- 239000011247 coating layer Substances 0.000 claims description 24
- 238000000059 patterning Methods 0.000 claims description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- 230000004888 barrier function Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- MVPPADPHJFYWMZ-UHFFFAOYSA-N chlorobenzene Chemical compound ClC1=CC=CC=C1 MVPPADPHJFYWMZ-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910000978 Pb alloy Inorganic materials 0.000 description 1
- 229910020174 Pb-In Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58001186A JPS59126688A (ja) | 1983-01-10 | 1983-01-10 | リフトオフ法によるパタ−ン形成法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58001186A JPS59126688A (ja) | 1983-01-10 | 1983-01-10 | リフトオフ法によるパタ−ン形成法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59126688A JPS59126688A (ja) | 1984-07-21 |
| JPH0129055B2 true JPH0129055B2 (enrdf_load_stackoverflow) | 1989-06-07 |
Family
ID=11494416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58001186A Granted JPS59126688A (ja) | 1983-01-10 | 1983-01-10 | リフトオフ法によるパタ−ン形成法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59126688A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6273682A (ja) * | 1985-09-26 | 1987-04-04 | Agency Of Ind Science & Technol | ジョゼフソン・コンタクト形成方法 |
| JP5345507B2 (ja) * | 2009-11-10 | 2013-11-20 | 株式会社ソフ．エンジニアリング | リフトオフ装置およびリフトオフ処理方法 |
-
1983
- 1983-01-10 JP JP58001186A patent/JPS59126688A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59126688A (ja) | 1984-07-21 |
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