JPS59126688A - リフトオフ法によるパタ−ン形成法 - Google Patents
リフトオフ法によるパタ−ン形成法Info
- Publication number
- JPS59126688A JPS59126688A JP58001186A JP118683A JPS59126688A JP S59126688 A JPS59126688 A JP S59126688A JP 58001186 A JP58001186 A JP 58001186A JP 118683 A JP118683 A JP 118683A JP S59126688 A JPS59126688 A JP S59126688A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- coating layer
- cutting die
- deposit
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 19
- 230000007261 regionalization Effects 0.000 title description 2
- 239000010410 layer Substances 0.000 claims abstract description 36
- 239000011247 coating layer Substances 0.000 claims abstract description 25
- 238000005520 cutting process Methods 0.000 claims abstract description 17
- 238000000059 patterning Methods 0.000 claims description 3
- 206010011224 Cough Diseases 0.000 claims 1
- 230000010358 mechanical oscillation Effects 0.000 abstract 2
- 239000000126 substance Substances 0.000 abstract 2
- 238000004080 punching Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 239000013049 sediment Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- MVPPADPHJFYWMZ-UHFFFAOYSA-N chlorobenzene Chemical compound ClC1=CC=CC=C1 MVPPADPHJFYWMZ-UHFFFAOYSA-N 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 208000012868 Overgrowth Diseases 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58001186A JPS59126688A (ja) | 1983-01-10 | 1983-01-10 | リフトオフ法によるパタ−ン形成法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58001186A JPS59126688A (ja) | 1983-01-10 | 1983-01-10 | リフトオフ法によるパタ−ン形成法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59126688A true JPS59126688A (ja) | 1984-07-21 |
| JPH0129055B2 JPH0129055B2 (enrdf_load_stackoverflow) | 1989-06-07 |
Family
ID=11494416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58001186A Granted JPS59126688A (ja) | 1983-01-10 | 1983-01-10 | リフトオフ法によるパタ−ン形成法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59126688A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6273682A (ja) * | 1985-09-26 | 1987-04-04 | Agency Of Ind Science & Technol | ジョゼフソン・コンタクト形成方法 |
| JP2011103361A (ja) * | 2009-11-10 | 2011-05-26 | Sofu Engineering:Kk | リフトオフ装置およびリフトオフ処理方法 |
-
1983
- 1983-01-10 JP JP58001186A patent/JPS59126688A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6273682A (ja) * | 1985-09-26 | 1987-04-04 | Agency Of Ind Science & Technol | ジョゼフソン・コンタクト形成方法 |
| JP2011103361A (ja) * | 2009-11-10 | 2011-05-26 | Sofu Engineering:Kk | リフトオフ装置およびリフトオフ処理方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0129055B2 (enrdf_load_stackoverflow) | 1989-06-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE602004012590T2 (de) | Verfahren und systeme zum versehen von mems-vorrichtungen mit einer oberkappe und oberen erfassungsplatte | |
| EP1240529B1 (de) | Verfahren zur herstellung mikromechanischer strukturen | |
| ATE371200T1 (de) | Verfahren zur herstellung von zwei überlagernden mikrostrukturen | |
| JPS59126688A (ja) | リフトオフ法によるパタ−ン形成法 | |
| US4368245A (en) | Method for making matt diffusion patterns | |
| WO2007031241A1 (de) | Laminiertes substrat für die montage von elektronischen bauteilen | |
| DE10232190A1 (de) | Verfahren zur Herstellung eines Bauelements mit tiefliegenden Anschlußflächen | |
| JPH01287968A (ja) | 半導体装置の製造方法 | |
| JPS6222463B2 (enrdf_load_stackoverflow) | ||
| JPS63132452A (ja) | パタ−ン形成方法 | |
| JP3077918B2 (ja) | エッチング方法 | |
| JPS602956A (ja) | フオトマスクの製造方法 | |
| JP2962490B2 (ja) | 配線構体形成法 | |
| JPH09246159A (ja) | 位置合せ用マークを用いた半導体装置の製法 | |
| JPH01251722A (ja) | 半導体装置の製造方法 | |
| JPS59126687A (ja) | リフトオフ法によるパタ−ン形成法 | |
| JPS59232423A (ja) | パタ−ン形成方法 | |
| JP2543891B2 (ja) | 微細パタ−ンの形成方法 | |
| JPS5823739B2 (ja) | キンゾクデンキヨクノ ケイセイホウホウ | |
| JPS6263411A (ja) | 薄膜コイルの製造方法 | |
| JPH05832A (ja) | ガラス系素材のエツチング加工方法 | |
| JPS61170018A (ja) | エピタキシヤル成長法による半導体の製造方法 | |
| DE102010016781A1 (de) | Verfahren zur Herstellung einer flexiblen Schaltungsanordnung | |
| JPS63278349A (ja) | 半導体装置の製造方法 | |
| JPS5867048A (ja) | 半導体装置の製造方法 |