JPS6260832B2 - - Google Patents

Info

Publication number
JPS6260832B2
JPS6260832B2 JP58001183A JP118383A JPS6260832B2 JP S6260832 B2 JPS6260832 B2 JP S6260832B2 JP 58001183 A JP58001183 A JP 58001183A JP 118383 A JP118383 A JP 118383A JP S6260832 B2 JPS6260832 B2 JP S6260832B2
Authority
JP
Japan
Prior art keywords
cutting die
layer
substrate
pattern
deposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58001183A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59126685A (ja
Inventor
Ichiro Ishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP58001183A priority Critical patent/JPS59126685A/ja
Publication of JPS59126685A publication Critical patent/JPS59126685A/ja
Publication of JPS6260832B2 publication Critical patent/JPS6260832B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Drying Of Semiconductors (AREA)
JP58001183A 1983-01-10 1983-01-10 リフトオフ法によるパタ−ン形成法 Granted JPS59126685A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58001183A JPS59126685A (ja) 1983-01-10 1983-01-10 リフトオフ法によるパタ−ン形成法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58001183A JPS59126685A (ja) 1983-01-10 1983-01-10 リフトオフ法によるパタ−ン形成法

Publications (2)

Publication Number Publication Date
JPS59126685A JPS59126685A (ja) 1984-07-21
JPS6260832B2 true JPS6260832B2 (enrdf_load_stackoverflow) 1987-12-18

Family

ID=11494332

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58001183A Granted JPS59126685A (ja) 1983-01-10 1983-01-10 リフトオフ法によるパタ−ン形成法

Country Status (1)

Country Link
JP (1) JPS59126685A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS59126685A (ja) 1984-07-21

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