JPH0122983B2 - - Google Patents

Info

Publication number
JPH0122983B2
JPH0122983B2 JP57042185A JP4218582A JPH0122983B2 JP H0122983 B2 JPH0122983 B2 JP H0122983B2 JP 57042185 A JP57042185 A JP 57042185A JP 4218582 A JP4218582 A JP 4218582A JP H0122983 B2 JPH0122983 B2 JP H0122983B2
Authority
JP
Japan
Prior art keywords
region
forming
metal
layer
metal layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57042185A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58159353A (ja
Inventor
Nobuaki Yamamori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP4218582A priority Critical patent/JPS58159353A/ja
Publication of JPS58159353A publication Critical patent/JPS58159353A/ja
Publication of JPH0122983B2 publication Critical patent/JPH0122983B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP4218582A 1982-03-17 1982-03-17 半導体装置の製造方法 Granted JPS58159353A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4218582A JPS58159353A (ja) 1982-03-17 1982-03-17 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4218582A JPS58159353A (ja) 1982-03-17 1982-03-17 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS58159353A JPS58159353A (ja) 1983-09-21
JPH0122983B2 true JPH0122983B2 (enrdf_load_stackoverflow) 1989-04-28

Family

ID=12628940

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4218582A Granted JPS58159353A (ja) 1982-03-17 1982-03-17 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS58159353A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5111474B2 (enrdf_load_stackoverflow) * 1972-05-24 1976-04-12

Also Published As

Publication number Publication date
JPS58159353A (ja) 1983-09-21

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