JPH0120549B2 - - Google Patents
Info
- Publication number
- JPH0120549B2 JPH0120549B2 JP56041525A JP4152581A JPH0120549B2 JP H0120549 B2 JPH0120549 B2 JP H0120549B2 JP 56041525 A JP56041525 A JP 56041525A JP 4152581 A JP4152581 A JP 4152581A JP H0120549 B2 JPH0120549 B2 JP H0120549B2
- Authority
- JP
- Japan
- Prior art keywords
- region
- electrode
- field
- guard
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 4
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims description 3
- 230000015556 catabolic process Effects 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 230000005684 electric field Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/70—Bipolar devices
- H01L29/72—Transistor-type devices, i.e. able to continuously respond to applied control signals
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Bipolar Transistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4152581A JPS57155773A (en) | 1981-03-20 | 1981-03-20 | High pressure-resistant planar transistor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4152581A JPS57155773A (en) | 1981-03-20 | 1981-03-20 | High pressure-resistant planar transistor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57155773A JPS57155773A (en) | 1982-09-25 |
JPH0120549B2 true JPH0120549B2 (de) | 1989-04-17 |
Family
ID=12610803
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4152581A Granted JPS57155773A (en) | 1981-03-20 | 1981-03-20 | High pressure-resistant planar transistor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57155773A (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58114434A (ja) * | 1981-12-28 | 1983-07-07 | Fujitsu Ltd | 高耐圧半導体装置 |
JPS60153164A (ja) * | 1984-01-20 | 1985-08-12 | Nec Corp | 半導体装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4968669A (de) * | 1972-11-06 | 1974-07-03 | ||
JPS5269275A (en) * | 1975-12-08 | 1977-06-08 | Hitachi Ltd | Transistor |
JPS5318382A (en) * | 1976-08-02 | 1978-02-20 | Rca Corp | Method of manufacturing crt screen structure |
-
1981
- 1981-03-20 JP JP4152581A patent/JPS57155773A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4968669A (de) * | 1972-11-06 | 1974-07-03 | ||
JPS5269275A (en) * | 1975-12-08 | 1977-06-08 | Hitachi Ltd | Transistor |
JPS5318382A (en) * | 1976-08-02 | 1978-02-20 | Rca Corp | Method of manufacturing crt screen structure |
Also Published As
Publication number | Publication date |
---|---|
JPS57155773A (en) | 1982-09-25 |
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