JPH0119804Y2 - - Google Patents

Info

Publication number
JPH0119804Y2
JPH0119804Y2 JP13402482U JP13402482U JPH0119804Y2 JP H0119804 Y2 JPH0119804 Y2 JP H0119804Y2 JP 13402482 U JP13402482 U JP 13402482U JP 13402482 U JP13402482 U JP 13402482U JP H0119804 Y2 JPH0119804 Y2 JP H0119804Y2
Authority
JP
Japan
Prior art keywords
sample
sample surface
electron
scanning
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13402482U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5941856U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13402482U priority Critical patent/JPS5941856U/ja
Publication of JPS5941856U publication Critical patent/JPS5941856U/ja
Application granted granted Critical
Publication of JPH0119804Y2 publication Critical patent/JPH0119804Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
JP13402482U 1982-09-03 1982-09-03 分析装置等における試料面エツチング装置 Granted JPS5941856U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13402482U JPS5941856U (ja) 1982-09-03 1982-09-03 分析装置等における試料面エツチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13402482U JPS5941856U (ja) 1982-09-03 1982-09-03 分析装置等における試料面エツチング装置

Publications (2)

Publication Number Publication Date
JPS5941856U JPS5941856U (ja) 1984-03-17
JPH0119804Y2 true JPH0119804Y2 (enrdf_load_stackoverflow) 1989-06-07

Family

ID=30302118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13402482U Granted JPS5941856U (ja) 1982-09-03 1982-09-03 分析装置等における試料面エツチング装置

Country Status (1)

Country Link
JP (1) JPS5941856U (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0797093B2 (ja) * 1988-08-09 1995-10-18 株式会社島津製作所 Ｘ線光電子分光３次元マッピング装置
JP5825797B2 (ja) * 2011-02-08 2015-12-02 株式会社ブリヂストン 高分子材料の評価方法
JP2014092426A (ja) * 2012-11-02 2014-05-19 Ube Scientific Analysis Laboratory Inc 表面分析用有機物試料の製造方法及びそれを用いた表面分析方法

Also Published As

Publication number Publication date
JPS5941856U (ja) 1984-03-17

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