JPS645746B2 - - Google Patents
Info
- Publication number
- JPS645746B2 JPS645746B2 JP57157589A JP15758982A JPS645746B2 JP S645746 B2 JPS645746 B2 JP S645746B2 JP 57157589 A JP57157589 A JP 57157589A JP 15758982 A JP15758982 A JP 15758982A JP S645746 B2 JPS645746 B2 JP S645746B2
- Authority
- JP
- Japan
- Prior art keywords
- energy
- analyzer
- particle beam
- charged particle
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 claims description 15
- 238000003384 imaging method Methods 0.000 claims description 9
- 230000005284 excitation Effects 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 238000010408 sweeping Methods 0.000 claims description 2
- 230000001360 synchronised effect Effects 0.000 claims description 2
- 238000000926 separation method Methods 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/261—Details
- H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Tubes For Measurement (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57157589A JPS5946747A (ja) | 1982-09-09 | 1982-09-09 | 荷電粒子線エネルギ−分析装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57157589A JPS5946747A (ja) | 1982-09-09 | 1982-09-09 | 荷電粒子線エネルギ−分析装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5946747A JPS5946747A (ja) | 1984-03-16 |
| JPS645746B2 true JPS645746B2 (enrdf_load_stackoverflow) | 1989-01-31 |
Family
ID=15653004
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57157589A Granted JPS5946747A (ja) | 1982-09-09 | 1982-09-09 | 荷電粒子線エネルギ−分析装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5946747A (enrdf_load_stackoverflow) |
-
1982
- 1982-09-09 JP JP57157589A patent/JPS5946747A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5946747A (ja) | 1984-03-16 |