JPS6335481Y2 - - Google Patents
Info
- Publication number
- JPS6335481Y2 JPS6335481Y2 JP14152182U JP14152182U JPS6335481Y2 JP S6335481 Y2 JPS6335481 Y2 JP S6335481Y2 JP 14152182 U JP14152182 U JP 14152182U JP 14152182 U JP14152182 U JP 14152182U JP S6335481 Y2 JPS6335481 Y2 JP S6335481Y2
- Authority
- JP
- Japan
- Prior art keywords
- analyzer
- charged particle
- particle beam
- energy
- fluorescent surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 14
- 239000002245 particle Substances 0.000 claims description 14
- 238000004458 analytical method Methods 0.000 claims description 10
- 239000013307 optical fiber Substances 0.000 claims description 9
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 239000000835 fiber Substances 0.000 description 9
- 238000010894 electron beam technology Methods 0.000 description 8
- 238000001228 spectrum Methods 0.000 description 4
- 230000004075 alteration Effects 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14152182U JPS5945851U (ja) | 1982-09-18 | 1982-09-18 | 荷電粒子線エネルギ−分析装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14152182U JPS5945851U (ja) | 1982-09-18 | 1982-09-18 | 荷電粒子線エネルギ−分析装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5945851U JPS5945851U (ja) | 1984-03-27 |
| JPS6335481Y2 true JPS6335481Y2 (enrdf_load_stackoverflow) | 1988-09-20 |
Family
ID=30316503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14152182U Granted JPS5945851U (ja) | 1982-09-18 | 1982-09-18 | 荷電粒子線エネルギ−分析装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5945851U (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4045058B2 (ja) * | 1999-11-22 | 2008-02-13 | 株式会社日立製作所 | 多重荷電粒子検出器、及びそれを用いた走査透過電子顕微鏡 |
-
1982
- 1982-09-18 JP JP14152182U patent/JPS5945851U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5945851U (ja) | 1984-03-27 |
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