JPH0439657Y2 - - Google Patents
Info
- Publication number
- JPH0439657Y2 JPH0439657Y2 JP3399286U JP3399286U JPH0439657Y2 JP H0439657 Y2 JPH0439657 Y2 JP H0439657Y2 JP 3399286 U JP3399286 U JP 3399286U JP 3399286 U JP3399286 U JP 3399286U JP H0439657 Y2 JPH0439657 Y2 JP H0439657Y2
- Authority
- JP
- Japan
- Prior art keywords
- cathodoluminescence
- light
- detection means
- image
- cathodoluminescence light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005136 cathodoluminescence Methods 0.000 claims description 77
- 238000001514 detection method Methods 0.000 claims description 18
- 238000010894 electron beam technology Methods 0.000 claims description 9
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 2
- 230000003595 spectral effect Effects 0.000 description 11
- 238000004020 luminiscence type Methods 0.000 description 8
- 238000004611 spectroscopical analysis Methods 0.000 description 6
- 238000000605 extraction Methods 0.000 description 5
- 238000001228 spectrum Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- -1 GaAs compound Chemical class 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3399286U JPH0439657Y2 (enrdf_load_stackoverflow) | 1986-03-10 | 1986-03-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3399286U JPH0439657Y2 (enrdf_load_stackoverflow) | 1986-03-10 | 1986-03-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62145262U JPS62145262U (enrdf_load_stackoverflow) | 1987-09-12 |
| JPH0439657Y2 true JPH0439657Y2 (enrdf_load_stackoverflow) | 1992-09-17 |
Family
ID=30842117
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3399286U Expired JPH0439657Y2 (enrdf_load_stackoverflow) | 1986-03-10 | 1986-03-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0439657Y2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3441949B2 (ja) * | 1997-12-18 | 2003-09-02 | 株式会社日立製作所 | 走査電子顕微鏡 |
| US10707051B2 (en) * | 2018-05-14 | 2020-07-07 | Gatan, Inc. | Cathodoluminescence optical hub |
-
1986
- 1986-03-10 JP JP3399286U patent/JPH0439657Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62145262U (enrdf_load_stackoverflow) | 1987-09-12 |
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