JPH0118309Y2 - - Google Patents

Info

Publication number
JPH0118309Y2
JPH0118309Y2 JP1981023022U JP2302281U JPH0118309Y2 JP H0118309 Y2 JPH0118309 Y2 JP H0118309Y2 JP 1981023022 U JP1981023022 U JP 1981023022U JP 2302281 U JP2302281 U JP 2302281U JP H0118309 Y2 JPH0118309 Y2 JP H0118309Y2
Authority
JP
Japan
Prior art keywords
marking
semiconductor devices
diamond
scratch
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981023022U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57136681U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981023022U priority Critical patent/JPH0118309Y2/ja
Publication of JPS57136681U publication Critical patent/JPS57136681U/ja
Application granted granted Critical
Publication of JPH0118309Y2 publication Critical patent/JPH0118309Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1981023022U 1981-02-20 1981-02-20 Expired JPH0118309Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981023022U JPH0118309Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-02-20 1981-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981023022U JPH0118309Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-02-20 1981-02-20

Publications (2)

Publication Number Publication Date
JPS57136681U JPS57136681U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-08-26
JPH0118309Y2 true JPH0118309Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-05-29

Family

ID=29820791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981023022U Expired JPH0118309Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-02-20 1981-02-20

Country Status (1)

Country Link
JP (1) JPH0118309Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5381046B2 (ja) * 2008-11-28 2014-01-08 株式会社Sumco 半導体ウェーハのスクライブ装置、およびそれを備えたスクライブシステム
JP6807619B1 (ja) * 2020-05-22 2021-01-06 ハイソル株式会社 プローバ装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54173398U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1978-05-26 1979-12-07

Also Published As

Publication number Publication date
JPS57136681U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-08-26

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